Abstract
We show how the combined use of the methods of Rutherford backscattering of ions and X-ray fluorescence analysis under conditions of total external reflection of the flow of exciting hard X-ray radiation and registration of the X-ray radiation output during ion excitation allows to effectively diagnose the elemental composition of thin-film coatings and films of dry residues of liquids. These methods and the features of their experimental application are briefly described. Examples of the complex methodological analysis of real objects are given. The possibility of increasing the efficiency of the methods of X-ray fluorescence analysis of materials due to the inclusion in the X-ray optical schemes of experimental measurements of flat X-ray waveguide resonators is indicated.
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ACKNOWLEDGMENTS
The authors thank the RAS academician Yu.V. Gulyaev for his interest in our work.
Funding
The work was performed as part of the State assignment no. 075-00475-19-00 and was partially supported by the Russian Foundation for Basic Research, project nos. 19-07-00271 and 18-029-11029.
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Egorov, V.K., Egorov, E.V. & Afanas’ev, M.S. Ion-Beam and X-Ray Methods of Elemental Diagnostics of Thin Film Coatings. Phys. Solid State 61, 2480–2486 (2019). https://doi.org/10.1134/S1063783419120114
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DOI: https://doi.org/10.1134/S1063783419120114