Abstract
In this paper, we show the effect of synthesis temperature on the microstructure and electrophysical properties of ferroelectric Ba0.8Sr0.2TiO3 films during the formation on silicon substrates with a platinum sublayer. Based on our measurements, we conclude that temperature of synthesis of ferroelectric films affects their electrophysical and topographical properties.
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REFERENCES
K. A. Vorotilov, V. M. Mukhortov, and A. S. Sigov, Integrated Ferroelectric Devices, Ed. by A. S. Sigov (Energoatomizdat, Moscow, 2011) [in Russian].
A. K. Tagantsev, V. O. Sherman, K. F. Astafiev, J. Venkatesh, and N. Setter, J. Electroceram. 11, 5 (2003).
K. M. Rabe, Ch. H. Ahn, and J.-M. Triscone, Physics of Ferroelectrics: A Modern Perspective, Topics in A-pplied Physics (Springer, Berlin, Heidelberg, 2007).
S. Ezhilvalavan and Tseung-Yuen Tseng, Mater. Chem. Phys. 65, 227 (2000).
A. V. Tumarkin, E. R. Tepina, E. A. Nenasheva, N. F. Kartenko, and A. B. Kozyrev, Tech. Phys. 57, 787 (2012).
A. V. Tumarkin, S. V. Razumov, V. A. Volpyas, A. G. Gagarin, A. A. Odinets, M. V. Zlygostov, and E. N. Sapego, Tech. Phys. 62, 1592 (2017).
M. S. Afanas’ev and M. S. Ivanov, Phys. Solid State 51, 1328 (2009).
D. A. Kiselev, M. S. Afanasiev, S. A. Levashov, and G. V. Chucheva, Phys. Solid State 57, 1151 (2015).
M. S. Afanasiev, D. A. Kiselev, S. A. Levashov, V. A. Luzanov, A. E. Nabiev, V. G. Naryshkina, A. A. Sivov, and G. V. Chucheva, Phys. Solid State 60, 954 (2018).
E. I. Gol’dman, A. G. Zhdan, and G. V. Chucheva, Instrum. Exp. Tech. 40, 841 (1997).
T. Hamano, D. J. Towner, and B. W. Wessels, Appl. Phys. Lett. 83, 5274 (2003).
P. M. Suherman, T. J. Jackson, Y. Y. Tse, I. P. Jones, R. I. Chakalova, M. J. Lancaster, and A. Porch, J. Appl. Phys. 99, 104101 (2006).
I. Horcas, R. Fernández, J. M. Gomez-Rodriguez, J. W. S. X. Colchero, J. W. S. X. M. Gómez-Herrero, and A. M. Baro, Rev. Sci. Instrum. 78, 013705 (2007).
R. C. Munoz, G. Vidal, M. Mulsow, J. G. Lisoni, C. Arenas, A. Concha, and R. Esparza, Phys. Rev. B 62, 4686 (2000).
Funding
This work was performed within the framework of a state assignment and was partially supported by the Russian Foundation for Basic Research, projects nos. 18-29-11029 and 19-07-00271. Scanning probe microscopy studies were partially supported by the Ministry of Science and Higher Education of the Russian Federation, project no. 11.9706.2017/7.8.
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Afanasiev, M.S., Kiselev, D.A., Levashov, S.A. et al. The Effect of Synthesis Temperature on the Microstructure and Electrophysical Properties of BST 80/20 Films. Phys. Solid State 61, 1910–1914 (2019). https://doi.org/10.1134/S1063783419100032
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DOI: https://doi.org/10.1134/S1063783419100032