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The Field Effect in a Metal–Ferroelectric–Semiconductor System of Multilayer Ferroelectric Films with Various Structure Types

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Abstract

The ability to grow the interfacial defect-poor Sr0.5Ba0.5Nb2O6 + Ba0.2Sr0.8TiO3 and Ba0.8Sr0.2TiO3 + Ba0.4Sr0.6TiO3 ferroelectric films onto the doped silicon substrates is discussed. A study of piezo-response via the quasi-static method (using the electrode area of 0.07 mm2) reveals that heterostructures possess an initial polarized ferroelectric state with a spontaneous polarization vector perpendicular to the substrate at any type of Si conductivity. The polarized state is established to refer to two-dimension stresses in the ferroelectric, which is tunable through a preprepared BaxSr1 – xTiO3 onto a sublayer substrate as well as to a thickness of this sublayer. Polarization switching in Sr0.5Ba0.5Nb2O6/Si and Ba0.8Sr0.2TiO3/Si heterostructures under the external field arises at only using the barium–strontium titanate sublayer predeposited onto silicon. A 15% decrease in switching polarization in Ba0.8Sr0.2TiO3/Ba0.4Sr0.6TiO3/Si structures is observed after 500 h.

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Correspondence to V. M. Mukhortov.

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Original Russian Text © V.M. Mukhortov, Yu.I. Golovko, A.V. Pavlenko, D.V. Stryukov, S.V. Biryukov, A.P. Kovtun, S.P. Zinchenko, 2018, published in Fizika Tverdogo Tela, 2018, Vol. 60, No. 9, pp. 1741–1747.

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Mukhortov, V.M., Golovko, Y.I., Pavlenko, A.V. et al. The Field Effect in a Metal–Ferroelectric–Semiconductor System of Multilayer Ferroelectric Films with Various Structure Types. Phys. Solid State 60, 1786–1792 (2018). https://doi.org/10.1134/S1063783418090202

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  • DOI: https://doi.org/10.1134/S1063783418090202

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