Skip to main content
Log in

Distribution of 28Si, 29Si, and 30Si isotopes under plastic deformation in subsurface layers of Si: B crystals

  • Semiconductors
  • Published:
Physics of the Solid State Aims and scope Submit manuscript

Abstract

The redistribution of 28Si, 29Si, and 30Si isotopes in subsurface layers of Si: B single crystals after their plastic deformation has been revealed. It has been found that the distribution profile of 28Si and 29Si isotopes becomes smoother after deformation, whereas the 30Si isotope distribution remains unchanged. A change in the subsurface profile of the 29SiO oxide is observed, which indicates the migration of the 29Si isotope in the composition of oxygen complexes during plastic deformation.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. F. A. Zwanenburg, A. S. Dzurak, A. Morello, M. Y. Simmons, L. C. L. Hollenberg, G. Klimeck, S. Rogge, S. N. Coppersmith, and M. A. Eriksson, Rev. Mod. Phys. 85, 961 (2013).

    Article  ADS  Google Scholar 

  2. Y. Shimizu, A. Takano, and K. M. Itoh, Appl. Surf. Sci. 255, 1345 (2008).

    Article  ADS  Google Scholar 

  3. Y. Shimizu, Y. Kawamura, M. Uematsu, K. M. Itoh, M. Tomita, M. Sasaki, H. Uchida, and M. Takahashi, Appl. Phys. 106, 076102 (2009).

    Article  Google Scholar 

  4. L. Kalinowski and R. Seguin, Appl. Phys. Lett. 35, 211 (1979).

    Article  ADS  Google Scholar 

  5. I. C. Vickridge, O. Kaitasov, R. J. Chater, and J. A. Kilner, Nucl. Instrum. Methods Phys. Res., Sect. B 161–163, 441 (2000).

    Article  Google Scholar 

  6. E. Hüger, R. Kube, H. Bracht, J. Stahn, T. Geue, and H. Schmidt, Phys. Status Solidi B 249, 2108 (2012).

    Article  ADS  Google Scholar 

  7. H. Bracht, E. E. Haller, and R. Clark-Phelps, Phys. Rev. Lett. 81, 393 (1998).

    Article  ADS  Google Scholar 

  8. G. Stingeder, M. Grundnerg, and M. Grasserbauer, Surf. Interface Anal. 11, 407413 (1988).

    Article  Google Scholar 

  9. J. Kato, K. M. Itoh, H. Yamada-Kaneta, and H. Pohl, Phys. Rev. B: Condens. Matter 68, 035205 (2003).

    Article  ADS  Google Scholar 

  10. A. M. Stoneham, M. A. Szymanski, and A. L. Shluger, Phys. Rev. B: Condens. Matter 63, 241304R (2001).

    Article  ADS  Google Scholar 

  11. A. Bongiorno and A. Pasquarello, Phys. Rev. Lett. 93, 086102 (2004).

    Article  ADS  Google Scholar 

  12. O. V. Koplak, A. I. Dmitriev, T. Kakeshita, and R. B. Morgunov, Appl. Phys. 110, 044905 (2011).

    Article  Google Scholar 

  13. O. Koplak, R. Morgunov, and A. Buchachenko, Chem. Phys. Lett. 560, 29 (2013).

    Article  ADS  Google Scholar 

  14. O. V. Koplak, A. I. Dmitriev, and R. B. Morgunov, Phys. Solid State 57 (1), 100 (2015).

    Article  ADS  Google Scholar 

  15. V. T. Cherepin and M. A. Vasil’ev, Secondary Ion–Ion Emission of Metals and Alloys (Naukova Dumka, Kiev, 1975) [in Russian].

    Google Scholar 

  16. V. T. Cherepin and M. A. Vasil’ev, Methods and Instruments for Analysis of the Surface of Materials (Naukova Dumka, Kiev, 1982) [in Russian].

    Google Scholar 

  17. E. Ya. Geguzin, Sov. Phys.—Usp. 29 (5), 467 (1986).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to R. B. Morgunov.

Additional information

Original Russian Text © O.V. Koplak, M.A. Vasil’ev, R.B. Morgunov, 2016, published in Fizika Tverdogo Tela, 2016, Vol. 58, No. 2, pp. 242–245.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Koplak, O.V., Vasil’ev, M.A. & Morgunov, R.B. Distribution of 28Si, 29Si, and 30Si isotopes under plastic deformation in subsurface layers of Si: B crystals. Phys. Solid State 58, 247–250 (2016). https://doi.org/10.1134/S1063783416020165

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063783416020165

Navigation