Abstract
The kinetics of formation and growth of critical nuclei in nanostructured films of borides, nitrides, and silicides grown by ion deposition methods has been studied using X-ray diffraction, electron microscopy, and secondary-ion mass spectrometry. The relationships have been obtained allowing not only the calculation of the critical nucleus size, the rate of their formation and growth in the films, but also the prediction of these parameters based on the data on adhesion, supersaturation, and elastic characteristics of grown phases.
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References
R. A. Andrievskii, Ross. Khim. Zh. 66, 103 (2002).
A. D. Pogrebnyak, A. P. Shpak, N. A. Azarenkov, and V. M. Beresnev, Phys.—Usp. 52(1), 29 (2009).
R. A. Andrievskii, G. V. Kalinnikov, N. P. Kobelev, Ya.M. Soifer, and D. V. Shtanskii, Phys. Solid State 39(10), 1661 (1997).
P. Le Clair, G. P. Berera, and J. S. Moodera, Thin Solid Films 376, 9 (2000).
J. M. Lopez, F. J. Gordillo-Vazquez, O. Bohme, and J. M. Albella, Appl. Surf. Sci. 173(3–4), 280 (2001).
H. B. Nie, S. Y. Xu, S. J. Wang, L. P. You, Z. Yang, C. K. Ong, J. Li, and T. Y. F. Liew, Appl. Phys. A: Mater. Sci. Process. 73, 229 (2001).
D. V. Shtanskii, S. A. Kulinich, E. A. Levashov, and J. J. Moore, Phys. Solid State 45(6), 1177 (2003).
H. Zeman, J. Muzil, and P. Zeman, J. Vac. Sci. Technol., A 22(3), 646 (2004).
J. Muzil, Acta Metall. Sin. 18(3), 433 (2005).
Nanostructured Coatings, Ed. by A. Cavaleiro and J. T. De Hosson (Springer, Berlin, 2006).
Yu. Yang, S. Jayraman, D. Y. Kim, G. S. Ginolann, and J. R. Abelson, J. Cryst. Growth 294 389 (2006).
J. Musil and P. Zeman, Solid State Phenom. 127, 31 (2007).
S. Veprek, M. G. J. Veprek-Heijman, P. Karvankova, and J. Prochazka, Thin Solid Films 476, 1 (2005).
A. A. Goncharov, P. I. Ignatenko, V. V. Petukhov, V.A. Konovalov, G. K. Volkova, V. A. Stupak, and V. A. Glazunova, Tech. Phys. 51(10), 1340 (2006).
A. A. Goncharov, P. I. Ignatenko, V. A. Konovalov, V. A. Stupak, G. K. Volkova, V. A. Glazunova, and V. V. Petukhov, Phys. Met. Metallogr. 103(1), 77 (2007).
P. I. Ignatenko, A. A. Goncharov, and D. N. Terpii, Inorg. Mater. 43(4), 344 (2007).
P. I. Ignatenko, Phys. Met. Metallogr. 105(4), 383 (2008).
P. I. Ignatenko, D. N. Terpiy, and N. A. Klyakhina, Tech. Phys. 54(7), 1027 (2009).
O. V. Sobol’, Phys. Solid State 49(6), 1161 (2007).
A. A. Goncharov, Phys. Solid State 50(1), 168 (2008).
P. I. Ignatenko, Phys. Solid State 51(8), 1730 (2009).
P. I. Ignatenko, Phys. Solid State 52(10), 2177 (2010).
P. I. Ignatenko, Tech. Phys. 56(2), 264 (2011).
A. A. Chernov, in Modern Crystallography, Ed. by B. K. Vainshtein (Nauka, Moscow, 1980; Nova Science, New York, 1988), p. 7.
P. I. Ignatenko, Izv. Akad. Nauk SSSR, Met., No. 2, 167 (1982).
P. I. Ignatenko, Fiz. Tekh. Vys. Davlenii (Donetsk, Ukr.) 9(4), 111 (1999).
V. M. Ievlev, in Proceedings of the International Symposium “Kharkiv Scientific Assembly,” ISTFT-15, Kharkiv, Ukraine, April 22-27, 2002, p. 82.
J. Christian, The Theory of Transformations in Metals and Alloys, Part 1: Equilibrium and General Kinetic Theory (Pergamon, Oxford, 1975; Mir, Moscow, 1978).
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Original Russian Text © P.I. Ignatenko, N.P. Ivanitsyn, 2012, published in Fizika Tverdogo Tela, 2012, Vol. 54, No. 12, pp. 2378–2382.
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Ignatenko, P.I., Ivanitsyn, N.P. Kinetics of the formation and growth of critical nuclei in nanostructured films of borides, nitrides, and silicides. Phys. Solid State 54, 2503–2507 (2012). https://doi.org/10.1134/S1063783412120153
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DOI: https://doi.org/10.1134/S1063783412120153