Abstract
The structure of lead zirconate titanate Pb(Zr x Ti1 − x )O3 thin films grown by chemical solution deposition on Si-SiO2-Ti-Pt substrates has been studied using transmission electron microscopy and energy-dispersive analysis. Films crystallization has been performed using laser annealing. It has been found that, in contrast to isothermal annealing where nucleation on the platinum layer dominates, crystallization and growth of spherical perovskite crystals occur in the film bulk. The perovskite phase crystal size increases from 10 to 120 nm with increasing laser beam energy.
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K. A. Vorotilov, O. M. Zhigalina, V. A. Vasil’ev, and A. S. Sigov, Phys. Solid State 51(7), 1337 (2009).
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Original Russian Text © D.N. Khmelenin, O.M. Zhigalina, K.A. Vorotilov, I.G. Lebo, 2012, published in Fizika Tverdogo Tela, 2012, Vol. 54, No. 5, pp. 939–941.
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Khmelenin, D.N., Zhigalina, O.M., Vorotilov, K.A. et al. Crystallization of lead zirconate titanate films by laser annealing. Phys. Solid State 54, 999–1001 (2012). https://doi.org/10.1134/S1063783412050174
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DOI: https://doi.org/10.1134/S1063783412050174