Abstract
The spontaneous self-organization of a porous surface mosaic structure in the form of islands of oxidized por-Si nanocrystallites separated by silicon ledges has been observed during prolonged anodic etching of p-Si (100) in electrolytes with an internal current source. The por-Si mosaic structure is spontaneously formed as a result of relaxation of an elastically strained layer of the porous surface. The self-organization of the mosaic structure of the por-Si surface, island sizes, and the period of their arrangement are controlled by a number of factors arising in the complex heterophase system electrolyte/por-Si/c-Si/during etching, i.e., the spatio-temporal distribution of point defects of interstitials I Si and vacancies V Si in the c-Si surface region, the formation of capillary fluctuation forces at the electrolyte/por-Si/c-Si/interface, the elastic deformation forces induced by the lattice parameter mismatch between the oxidized por-Si nanocrystallites and the c-Si matrix. The conditions responsible for the manifestation of these forces depend on the self-consistent parameters of etching of the complex heterophase electrochemical system electrolyte/por-Si/c-Si/with an internal current source, including the electrode characteristics and cell parameters.
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Original Russian Text © K.B. Tynyshtykbaev, Yu.A. Ryabikin, K.A. Mit’, B.A. Rakymetov, T. Aitmukan, 2011, published in Fizika Tverdogo Tela, 2011, Vol. 53, No. 8, pp. 1498–1504.
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Tynyshtykbaev, K.B., Ryabikin, Y.A., Mit’, K.A. et al. Dynamics of formation of the mosaic structure of porous silicon during prolonged anodic etching in electrolytes with an internal current source. Phys. Solid State 53, 1575–1580 (2011). https://doi.org/10.1134/S1063783411080312
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DOI: https://doi.org/10.1134/S1063783411080312