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Electron-stimulated desorption of negative O− ions from the oxidized O/Ru surface

  • Low-Dimensional Systems and Surface Physics
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Abstract

This paper reports on a study of the electron-stimulated desorption of negative oxygen ions from the O/Ru surface, which represents an additional factor responsible for the destruction of the protective oxide layer of the mirrors used in ultraviolet lithography. The cross section of degradation of the O/Ru layer due to the electron-stimulated desorption of the O+ and O− ions and the O atoms has been found to be 1.6 × 10−19 cm2. A comparison of the dependences of the electron-stimulated desorption yield of O+ and O− ions on the incident electron energy E with the ionization cross section of the adsorbate core level σ O2s (E) has revealed that the ionization of the O 2s level is the main channel of the electron-stimulated desorption of O− ions.

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Authors and Affiliations

  1. Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    N. D. Potekhina & S. M. Solov’ev

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  1. N. D. Potekhina
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  2. S. M. Solov’ev
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Correspondence to S. M. Solov’ev.

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Original Russian Text © N.D. Potekhina, S.M. Solov’ev, 2010, published in Fizika Tverdogo Tela, 2010, Vol. 52, No. 3, pp. 600–606.

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Potekhina, N.D., Solov’ev, S.M. Electron-stimulated desorption of negative O− ions from the oxidized O/Ru surface. Phys. Solid State 52, 649–656 (2010). https://doi.org/10.1134/S1063783410030297

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