Skip to main content
Log in

Processes of silicide formation in the Fe/Si(111)7 × 7 system

  • Low-Dimensional Systems and Surface Physics
  • Published:
Physics of the Solid State Aims and scope Submit manuscript

Abstract

The initial stages of the formation of iron silicides in the Fe/Si(111)7 × 7 system in the course of solid-phase epitaxy are investigated using high-resolution photoelectron spectroscopy (∼100 meV) with synchrotron radiation. The spectra of the Si 2p core and valence-band electrons obtained after deposition of iron coverages of up to 28 monolayers on the surface of the sample and subsequent isochronous annealings at 650°C are measured and analyzed. It is shown that the first to form under Fe deposition is an ultrathin film of the metastable silicide FeSi with a CsCl-type structure, on which a layer of the Fe-Si solid solution with segregated silicon grows. At coverages in excess of 10 monolayers, an iron film grows on the surface of the sample. Annealing of a silicon crystal coated with a Fe layer leads to the sequential formation of two stable silicide phases, namely, the ɛ-FeSi and β-FeSi2 phases, in the near-surface region of the sample. It is found that the process of solid-phase synthesis of the ɛ-FeSi phase passes through the stage of transformation of the iron film into the Fe-Si solid solution.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. N. Cherief, J. Y. Veuillen, N. A. Ngugen Nan, and R. Cinti, Vacuum 41, 1350 (1990).

    Article  Google Scholar 

  2. J. Alvarez, J. J. Hinarejos, E. G. Michel, J. M. Gallego, and R. M. Miranda, Surf. Sci. 251/252, 59 (1991).

    Article  Google Scholar 

  3. J. Chevrier, V. Le Tranh, S. Nitshe, and J. Derrein, Appl. Surf. Sci. 56–58, 438 (1992).

    Article  Google Scholar 

  4. J. Alvarez, J. J. Hinarejos, E. G. Michel, G. R. Castro, and R. Miranda, Phys. Rev. B: Condens. Matter 45, 14 042 (1992).

    Google Scholar 

  5. J. M. Gallego, J. M. Garcia, J. Alvarez, and R. M. Miranda, Phys. Rev. B: Condens. Matter 46, 13339 (1992).

    Google Scholar 

  6. Le Thanh Vinh, J. Cherier, and J. Derrien, Phys. Rev. B: Condens. Matter 46, 15946 (1992).

  7. H. von Kanel, N. Onda, K. Sirringhaus, E. Muller-Gubler, S. Gonsalves-Conto, and C. Schawarz, Appl. Surf. Sci. 70/71, 559 (1993).

    Article  Google Scholar 

  8. H. Sirringhaus, N. Onda, E. Muller-Gubler, S. Gonsalves-Conto, and H. von Kanel, Phys. Rev. B: Condens. Matter 47, 10567 (1993).

    Google Scholar 

  9. K. Konuma, J. Vrijmoeth, P. M. Zagwijn, J. W. M. Frenken, E. Vlieg, and J. F. van der Veen, J. Appl. Phys. 73, 1104 (1993).

    Article  ADS  Google Scholar 

  10. W. Raunau, H. Niehus, and G. Comsa, Surf. Sci. 284, L375 (1993).

    Article  Google Scholar 

  11. J. Alvarez, A. L. Vazquez de Parga, J. J. Hinarejos, E. G. Michel, C. Ocal, and R. M. Miranda, Phys. Rev. B: Condens. Matter 47, 16048 (1993).

    Google Scholar 

  12. N. Jedrecy, A. Waldhauer, and M. Sauvage-Simkin, Phys. Rev. B: Condens. Matter 49, 4725 (1994).

    ADS  Google Scholar 

  13. X. Wallart, J. P. Nys, and C. Tetelin, Phys. Rev. B: Condens. Matter 49, 5714 (1994).

    ADS  Google Scholar 

  14. F. Sirotti, M. De Santis, V. Jin, and G. Rossi, Phys. Rev. B: Condens. Matter 49, 11134 (1994).

    Google Scholar 

  15. S. Hong, P. Wetzel, G. Gewinner, D. Bolmont, and C. Pirri, J. Appl. Phys. 78, 15404 (1995).

    Google Scholar 

  16. S. Hong, U. Kafader, P. Wetsel, and G. Gewinner, S. Pirri, Phys. Rev. B: Condens. Matter 51, 17667 (1995).

    Google Scholar 

  17. M. Hasegawa, N. Kobayeshi, and N. Nayashi, Surf. Sci. 357–358, 831 (1996).

    Google Scholar 

  18. J. Chrost, J. J. Hinarejes, P. Segovia, E. G. Michel, and R. Miranda, Surf. Sci. 371, 297 (1997).

    Article  ADS  Google Scholar 

  19. R. Kläsges, C. Carbone, W. Eberhardt, C. Pampuch, O. Rader, T. Kachel, and M. Gudat, Phys. Rev. B: Condens. Matter 56, 10801 (1997).

    Google Scholar 

  20. J. Avila, A. Mascaraque, C. Tecderescu, E. G. Michel, and M. C. Acerisio, Surf. Sci. 377–379, 856 (1997).

    Article  Google Scholar 

  21. W. Weiß, M. Kutschera, U. Starke, M. Mozaffari, K. Reshoft, U. Kohler, and K. Heinz, Surf. Sci. 377–379, 861 (1997).

    Article  Google Scholar 

  22. D. Mangelinck, L. Wang, C. Lin, P. Gas, J. Grako, and M. Ostling, J. Appl. Phys. 83, 4193 (1998).

    Article  ADS  Google Scholar 

  23. P. Bertoncini, P. Wetzel, D. Berling, G. Gewinner, C. Ubhaq-Bouillet, and V. Pierron Bohnes, Phys. Rev. B: Condens. Matter 60, 11123 (1999).

  24. M. Sasase, T. Nakanoyma, and H. Yamamoto, Thin Solid Films 401, 73 (2001).

    Article  ADS  Google Scholar 

  25. M. Probst, R. Denecke, C. Whelan, M. Kinne, D. Borgmann, and H. P. Stein, Surf. Interface Anal. 34, 744 (2002).

    Article  Google Scholar 

  26. S. Walter, M. Klause, F. Blobner, S. Muller, U. Starke, and K. Heinz, J. Phys.: Condens. Matter 15, 5207 (2003).

    Article  ADS  Google Scholar 

  27. G. Garreau, S. Hajjar, S. Pelletier, M. Imhoff, and C. Pirri, Appl. Surf. Sci. 212–213, 711 (2003).

    Article  Google Scholar 

  28. S. Hajjar, G. Garreau, S. Pelletier, P. Bertoncini, P. Wetzel, G. Gewinner, M. Imhoff, and C. Pirri, Surf. Sci. 532–535, 940 (2003).

    Article  Google Scholar 

  29. A. Wawro, S. Suto, R. Czajka, and A. Kasuya, Phys. Rev. B: Condens. Matter 62, 11123 (2003).

    Google Scholar 

  30. N. G. Galkin, V. O. Polyarnyi, and A. S. Gouralnik, Thin Solid Films 404–405, 199 (2004).

    Article  Google Scholar 

  31. R. Tsushima, Y. Michishita, S. Fujii, H. Okado, K. Umezawa, Y. Maeda, Y. Terai, K. Oura, and M. Katayama, Surf. Sci. 579, 73 (2005).

    Article  ADS  Google Scholar 

  32. I. Dezsi, Cs. Detzer, I. Szucs, J. Dekoster, A. Vantonime, and M. Caymax, Surf. Sci. 599, 122 (2005).

    Article  ADS  Google Scholar 

  33. K. Kataoka, K. Hattori, Y. Miyatake, and H. Daimon, Phys. Rev. B: Condens. Matter 74, 155406 (2006).

    Google Scholar 

  34. M. V. Gomoyunova, D. E. Malygin, and I. I. Pronin, Fiz. Tverd. Tela (St. Petersburg) 48(10), 1898 (2006) [Phys. Solid State 48 (10), 2016 (2006)].

    Google Scholar 

  35. M. V. Gomoyunova, I. I. Pronin, D. E. Malygin, A. S. Voronchihin, D. V. Vyalikh, and S. L. Molodtsov, Surf. Sci. 601, 5069 (2007).

    Article  ADS  Google Scholar 

  36. N. I. Plyusnin, V. M. Il’yashchenko, S. V. Krylov, and S. A. Kitan’, Pis’ma Zh. Tekh. Fiz. 33(11), 79 (2007) [Tech. Phys. Lett. 33 (6), 486 (2007)].

    Google Scholar 

  37. M. C. Bost and J. E. Mahan, J. Appl. Phys. 58, 2696 (1985).

    Article  ADS  Google Scholar 

  38. J. Hafner and D. Spisak, Phys. Rev. B: Condens. Matter 75, 195411 (2007).

    Google Scholar 

  39. Q. G. Zhu, H. Iwesaki, D. Elen, D. Williams, and R. L. Park, J. Appl. Phys. 60, 2629 (1986).

    Article  ADS  Google Scholar 

  40. J. W. F. Egelhoff, Surf. Sci. Rep. 6, 253 (1987).

    Article  ADS  Google Scholar 

  41. M. V. Gomoyunova and I. I. Pronin, Zh. Tekh. Fiz. 74(10), 1 (2004) [Tech. Phys. 49 (10), 1249 (2004)].

    Google Scholar 

  42. M. V. Gomoyunova, I. I. Pronin, N. R. Gall’, S. L. Molodtsov, and D. V. Vyalykh, Fiz. Tverd. Tela (St. Petersburg) 45(8), 1519 (2003) [Phys. Solid State 45 (8), 1596 (2003)].

    Google Scholar 

  43. M. V. Gomoyunova, I. I. Pronin, N. R. Gall, D. V. Vyalikh, and S. L. Molodtsov, Surf. Sci. 578, 174 (2005).

    Article  ADS  Google Scholar 

  44. A. Ishizaka and Y. Shiraki, J. Electrochim. 133, 666 (1986).

    Article  Google Scholar 

  45. F. Sirotti, M. De Santis, and G. Rossi, Phys. Rev. B: Condens. Matter 48, 8299 (1993).

    ADS  Google Scholar 

  46. B. Egert and G. Panzner, Phys. Rev. B: Condens. Matter 29, 2091 (1984).

    ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to M. V. Gomoyunova.

Additional information

Original Russian Text © M.V. Gomoyunova, D.E. Malygin, I.I. Pronin, 2008, published in Fizika Tverdogo Tela, 2008, Vol. 50, No. 8, pp. 1518–1523.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Gomoyunova, M.V., Malygin, D.E. & Pronin, I.I. Processes of silicide formation in the Fe/Si(111)7 × 7 system. Phys. Solid State 50, 1579–1584 (2008). https://doi.org/10.1134/S1063783408080325

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063783408080325

PACS numbers

Navigation