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Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing

Abstract

It is experimentally shown that the process of the solid-phase synthesis of copper silicide is sensitive to magnetic fields. Upon low-temperature vacuum annealing of a Cu/Si(100) thin-film structure, a static magnetic field with moderate strength stimulates the alloying of silicon in copper and suppresses synthesis of the Cu3Si phase.

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Correspondence to E. Yu. Buchin.

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Original Russian Text © E.Yu. Buchin, V.V. Naumov, S.V. Vasilyev, 2017, published in Fizika i Tekhnika Poluprovodnikov, 2017, Vol. 51, No. 6, pp. 844–849.

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Buchin, E.Y., Naumov, V.V. & Vasilyev, S.V. Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing. Semiconductors 51, 812–816 (2017). https://doi.org/10.1134/S1063782617060069

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