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Semiconductors

, Volume 51, Issue 6, pp 812–816 | Cite as

Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing

  • E. Yu. BuchinEmail author
  • V. V. Naumov
  • S. V. Vasilyev
Fabrication, Treatment, and Testing of Materials and Structures

Abstract

It is experimentally shown that the process of the solid-phase synthesis of copper silicide is sensitive to magnetic fields. Upon low-temperature vacuum annealing of a Cu/Si(100) thin-film structure, a static magnetic field with moderate strength stimulates the alloying of silicon in copper and suppresses synthesis of the Cu3Si phase.

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Copyright information

© Pleiades Publishing, Ltd. 2017

Authors and Affiliations

  • E. Yu. Buchin
    • 1
    Email author
  • V. V. Naumov
    • 1
  • S. V. Vasilyev
    • 1
  1. 1.Institute of Physics and Technology, Yaroslavl BranchRussian Academy of SciencesYaroslavlRussia

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