Abstract
HEMT structures with In0.53Ga0.47As quantum well are synthesized using molecular-beam epitaxy on InP substrates. The structures are double-side Si δ-doped so that two dimensionally-quantized subbands are occupied. The effect of the central InAs nanoinsert in the quantum well on the electron effective masses m* and mobilities in each subband is studied. For experimental determination of m*, the quantum μ q and transport μ t mobilities of the two-dimensional electron gas in each dimensionally-quantized subband, the Shubnikov-de Haas effect is measured at two temperatures of 4.2 and 8.4 K. The electron effective masses are determined by the temperature dependence of the oscillation amplitudes, separating the oscillations of each dimensionally-quantized subband. The Fourier spectra of oscillations are used to determine the electron mobilities μ q and μ t in each dimensionally-quantized subband. It is shown that m* decreases as the InAs-nanoinsert thickness d in the In0.53Ga0.47As quantum well and electron mobilities increase. The maximum electron mobility is observed at the insert thickness d = 3.4 nm.
Similar content being viewed by others
References
H. Zhao, Y.-T. Chen, J. H. Yum, Y. Wang, F. Zhou, F. Xue, and J. C. Lee, Appl. Phys. Lett. 96, 102101 (2010).
J. A. del Alamo, Nature 479, 317 (2011).
X. Wallart, B. Pinsard, and F. Mollot, J. Appl. Phys. 97, 053706 (2005).
Dae-Hyun Kim and J. A. del Alamo, IEEE Electron. Dev. Lett. 31, 806 (2010).
Dong-Wan Roh, H. G. Lee, and D. W. Lee, J. Cryst. Growth 167, 468 (1996).
G. B. Galiev, I. S. Vasil’evskii, E. A. Klimov, V. G. Mokerov, and A. A. Cherechukin, Semiconductors 40, 1445 (2006).
K. Požela, A. Šilenas, J. Požela, V. Juciene, G. B. Galiev, I. S. Vasil’evskii, and E. A. Klimov, Appl. Phys. A 109, 233 (2012).
V. A. Kulbachinskii, N. A. Yuzeeva, G. B. Galiev, E. A. Klimov, I. S. Vasil’evskii, R. A. Khabibullin, and D. S. Ponomarev, Semicond. Sci. Technol. 27, 035021 (2012).
J. Požela, K. Požela, V. Juciene, and A. Shkolnic, Semicond. Sci. Technol. 26, 014025 (2011).
Th. Zhu, H. Goronkin, G. N. Maracas, R. Droopad, and M. A. Stroscio, Appl. Phys. Lett. 60, 2141 (1992).
D. Xu, H. G. Heiss, S. A. Kraus, M. Sex, G. Bohm, G. Trankle, G. Weimann, and G. Abstreiter, IEEE Trans. Electron. Dev. 45, 21 (1998).
T. Akazaki, K. Arai, T. Enoki, and Y. Ishii, IEEE Electron Dev. Lett. 13, 325 (1992).
M. Sexl, G. Bohm, D. Xu, H. Heib, S. Kraus, G. Trankle, and G. Weimann, J. Cryst. Growth 175–176, 915 (1997).
S. Bollaert, Y. Cordier, M. Zaknoune, T. Parenty, H. Happy, and A. Cappy, Ann. Telecommun. 56, 15 (2001).
I. Vurgaftman, J. R. Meyer, and L. R. Ram-Mohan, J. Appl. Phys. 89, 5815 (2001).
S. Ahmed, K. D. Holland, N. Paydavosi, C. M. S. Rogers, A. U. Alam, N. Neophytou, D. Kienle, and M. Vaidyanathan, IEEE Trans. Nanotechnol. 11, 1160 (2012).
D. Shoenberg, Magnetic Oscillations in Metals (Cambridge University Press, Cambridge, 1984; Mir, Moscow, 1986).
T. W. Kim, D. U. Lee, D. C. Choo, M. Jung, K. H. Yoo, M. S. Song, T. Yeo, G. Comanescu, B. D. McCombe, and M. D. Kim, J. Appl. Phys. 89, 2649 (2001).
P. T. Coleridge, M. Hayne, P. Zawadzki, and A. S. Sachrajda, Surf. Sci. 361–362, 560 (1996).
C. Diaz-Paniagua, M. A. Hidalgo, A. F. Brana, A. Urbina, F. Batallan, S. Fernandez de Avila, and F. Gonzalez-Sanz, Solid State Commun. 109, 785 (1999).
T. W. Kim and M. Jung, Solid State Commun. 111, 89 (1999).
T. Akazaki, J. Nitta, H. Takayanagi, T. Enoki, and K. Arai, J. Electron. Mater. 25, 745 (1996).
D. S. Ponomarev, I. S. Vasil’evskii, G. B. Galiev, E. A. Klimov, R. A. Khabibullin, V. A. Kulbachinskii, and N. A. Yuzeeva, Semiconductors 46, 484 (2012).
V. A. Kulbachinskii, N. A. Yuzeeva, G. B. Galiev, E. A. Klimov, I. S. Vasil’evskii, R. A. Khabibullin, and D. S. Ponomarev, Semicond. Sci. Technol. 27, 035021 (2012).
B. Jonsson and S. T. Eng, J. Quantum. Electron. 26, 2025 (1990).
Ch. Jirauschek, IEEE J. Quantum. Electron. 45, 1059 (2009).
V. A. Kulbachinskii, R. A. Lunin, V. G. Kytin, A. S. Bugaev, and A. P. Senichkin, J. Exp. Theor. Phys. 83, 841 (1996).
J. F. Kaiser and W. A. Reed, Rev. Sci. Instrum. 49, 1103 (1978).
T. Ando, A. Fowler, and F. Stern, Rev. Mod. Phys. 54, 437 (1982).
A. Ishihara and L. Smrchka, J. Phys. C 19, 6777 (1986).
P. T. Coleridge, Phys. Rev. B 44, 3793 (1991).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © V.A. Kulbachinskii, L.N. Oveshnikov, R.A. Lunin, N.A. Yuzeeva, G.B. Galiev, E.A. Klimov, P.P. Maltsev, 2015, published in Fizika i Tekhnika Poluprovodnikov, 2015, Vol. 49, No. 2, pp. 204–213.
Rights and permissions
About this article
Cite this article
Kulbachinskii, V.A., Oveshnikov, L.N., Lunin, R.A. et al. Experimental determination of the electron effective masses and mobilities in each dimensionally-quantized subband in an In x Ga1 − x As quantum well with InAs inserts. Semiconductors 49, 199–208 (2015). https://doi.org/10.1134/S1063782615020165
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063782615020165