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On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator

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Abstract

In terms of a two-dimensional quasi-stationary model, an exact solution for the fields inside a circular solenoid with an alternating current and an inner coaxial thin-walled cylindrical shield with longitudinal slots of finite width is obtained. The solution of this problem allows one to estimate the influence of the Faraday shield on the profiles of the magnetic and electric fields in the radio-frequency plasma generator.

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ACKNOWLEDGMENTS

The authors are grateful to Dr. V.I. Davydenko for the interest in this work and useful remarks.

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Authors and Affiliations

  1. Budker Institute of Nuclear Physics, Siberian Branch of the Russian Academy of Sciences, 630090, Novosibirsk, Russia

    T. D. Akhmetov, A. A. Ivanov & I. V. Shikhovtsev

  2. Novosibirsk State University, 630090, Novosibirsk, Russia

    T. D. Akhmetov, A. A. Ivanov & I. V. Shikhovtsev

Authors
  1. T. D. Akhmetov
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  2. A. A. Ivanov
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  3. I. V. Shikhovtsev
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Correspondence to T. D. Akhmetov.

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Translated by E. Smirnova

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Akhmetov, T.D., Ivanov, A.A. & Shikhovtsev, I.V. On the Influence of a Faraday Shield on the Vortex Electric Field in a Radio-Frequency Plasma Generator. Plasma Phys. Rep. 47, 732–741 (2021). https://doi.org/10.1134/S1063780X21070011

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  • DOI: https://doi.org/10.1134/S1063780X21070011

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