Abstract
The recombination kinetics of chlorine atoms on the wall of a plasmachemical reactor and on silicon samples in the positive column of a glow discharge in Cl2 has been studied experimentally. The rate constants and probabilities of the heterogeneous recombination of chlorine atoms on the plasma limiting surfaces, as well as of the chemical interaction of chlorine atoms with silicon, are calculated. The temperature and time dependences of the probabilities of the chemical interaction of chlorine atoms with silicon are analyzed, and optimal conditions for conducting pulse relaxation experiments are determined.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. S. Metel’, Plasma Phys. Rep. 38, 254 (2012).
A. M. Efremov, D. V. Sitanov, V. I. Svettsov, and D. I. Balashov, Thin Solid Films 516, 3020 (2008).
P. I. Nevzorov, D. I. Slovetskii, and E. F. Shelykhmanov, Khim. Vys. Energ. 21, 458 (1987).
V. N. Volynets, D. I. Slovetskii, A. Ya. Strochkov, and V. N. Trofimov, Zh. Prikl. Spectrosk. 54, 1004 (1991).
G. A. Curley, L. Gatilova, S. Guilet, S. Bouchoule, G. S. Gogna, N. Sirse, S. Karkari, and J. P. Booth, J. Vac. Sci. Technol. A 28, 1116 (2010).
Yu. P. Raizer, Gas Discharge Physics (Nauka, Moscow, 1992; Springer, Berlin, 1997).
A. K. Shuaibov, Tech. Phys. 47, 1341 (2002).
A. A. Kudryavtsev and L. D. Tsendin, Tech. Phys. Lett. 26, 582 (2000).
D. V. Sitanov and Yu. V. Kirillov, Khim. Vys. Energ. 38, 234 (2004).
P. Macko, P. Veis, and G. Cernogora, Plasma Sources Sci. Technol. 13, 251 (2004).
P. I. Nevzorov, D. I. Slovetskii, and E. F. Shelykhmanov, Referat. Zh. Khim. Plazmokhim., Pt. 1, 37 (1987).
D. V. Sitanov, A. E. Skorodumov, and V. I. Svettsov, Khim. Vys. Energ. 34, 382 (2000).
H. Okabe, Photochemistry of Small Molecules (Wiley, New York, 1978).
D. V. Sitanov and S. A. Pivovarenok, High Temp. 55, 455 (2017).
A. M. Efremov, V. I. Svettsov, and D. V. Sitanov, High Temp. 46, 11 (2008).
Yu. V. Kirillov, D. V. Sitanov, and V. I. Svettsov, Khim. Vys. Energ. 34, 377 (2000).
P. Kota Gowri, J. W. Coburn, and B. Graves David, J. Vac. Sci. Technol. A, No. 16, 270 (1998).
D. V. Sitanov, V. I. Svettsov, and A. M. Efremov, High Temp. 46, 301 (2008).
E. Hutton, Nature 203, 835 (1964).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © D.V. Sitanov, S.A. Pivovarenok, 2018, published in Fizika Plazmy, 2018, Vol. 44, No. 8, pp. 624–634.
Rights and permissions
About this article
Cite this article
Sitanov, D.V., Pivovarenok, S.A. Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma. Plasma Phys. Rep. 44, 713–722 (2018). https://doi.org/10.1134/S1063780X1808007X
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063780X1808007X