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Plasma Physics Reports

, Volume 42, Issue 3, pp 290–292 | Cite as

Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

  • A. F. Aleksandrov
  • A. K. Petrov
  • K. V. Vavilin
  • E. A. Kralkina
  • P. A. Neklyudova
  • A. M. Nikonov
  • V. B. Pavlov
  • A. A. Ayrapetov
  • V. V. Odinokov
  • V. A. Sologub
  • G. Ya. Pavlov
Applied Physics

Abstract

Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are described. It is shown that an increase in the external magnetic field leads to the formation of a plasma column and a shift of the maximum ion current along the discharge axis toward the bottom flange of the system. The shape of the plasma column can be controlled via varying the configuration of the magnetic field.

Keywords

External Magnetic Field Plasma Physic Report Plasma Column Magnetic Field Induction Bottom Flange 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Pleiades Publishing, Ltd. 2016

Authors and Affiliations

  • A. F. Aleksandrov
    • 1
  • A. K. Petrov
    • 1
  • K. V. Vavilin
    • 1
  • E. A. Kralkina
    • 1
  • P. A. Neklyudova
    • 1
  • A. M. Nikonov
    • 1
  • V. B. Pavlov
    • 1
  • A. A. Ayrapetov
    • 2
  • V. V. Odinokov
    • 2
  • V. A. Sologub
    • 2
  • G. Ya. Pavlov
    • 2
  1. 1.Faculty of PhysicsMoscow State UniversityMoscowRussia
  2. 2.Research Institute of Precision EngineeringMoscowRussia

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