Abstract
Results are presented from studies of physical principles underlying operation of high-power pulsed RF generators based on a hollow-cathode discharge (HCD). Various types of instabilities that may occur in an HCD and lead to 100% RF modulation of the electrode voltage in the megahertz frequency range are discussed. The design, electric characteristics, and operating modes of HCD-based RF generators are described. Results of experiments aimed at increasing the power and duration of RF pulses are presented. It is demonstrated that such devices are capable of generating 10- to 220-MHz pulses with a power of up to 8 MW, duration of up to 10 µs, and repetition rate of 1 kHz. The discharge chambers of such generators are very simple in design, they have very high stability, and their efficiency reaches 35%.
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References
B. I. Moskalev, Hollow-Cathode Discharge (Atomizdat, Moscow, 1969) [in Russian].
A. S. Metel’ and S. N. Grigor’ev, Glow Discharge with Electrostatic Electron Confinement (Yanus-K, Moscow, 2005) [in Russian].
F. Paschen, Ann. Phys. 50, 901 (1916).
Yu. E. Kreindel’, Plasma Sources of Electrons (Atomizdat, Moscow, 1977) [in Russian].
M. D. Gabovich, Physics and Technology of Plasma Ion Sources (Atomizdat, Moscow, 1972) [in Russian].
V. P. Afanas’ev, Fiz. Élement. Chast. Yadra 19, 1197 (1988).
A. T. Forrester, Large Ion Beams (Wiley, New York, 1988; Mir, Moscow, 1992).
A. P. Semenov, Sputtering Ion Beams: Production and Application (BNTs SO RAN, Ulan-Ude, 1999) [in Russian].
S. V. Bulychev, A. E. Dubinov, V. S. Zhdanov, et al., Prib. Tekh. Éksp., No. 3, 116 (1999) [Instrum. Exp. Tech. 42, 394 (1999)].
H. Pak and M. Kushner, J. Appl. Phys. 71, 94 (1992).
D. C. Gerstenberger, R. Solanki, and G. J. Collins, IEEE Trans. Quantum Electron. 16, 820 (1980).
K. A. Peard, K. Rózsa, and R. C. Tobin, J. Phys. D 27, 219 (1994).
T. I. Lee, K. W. Park, H. S. Hwang, et al., Plasma Sources Sci. Technol. 15, 458 (2006).
D. E. Holmgren, R. W. Falcone, D. J. Walker, and S. E. Harris, Opt. Lett. 9, 85 (1984).
H. Nagai, M. Hiramatsu, M. Hori, and T. Goto, Rev. Sci. Instrum. 74, 3453 (2003).
D. Andruczyk, P. X. Feng, B. W. James, and J. Howard, Plasma Sources Sci. Technol. 11, 426 (2002).
V. S. Cherednichenko and M. V. Cherednichenko, Hollow-Cathode Vacuum Plasma Furnaces (NGTU, Novosibirsk, 1999) [in Russian].
E. V. Dolbilin and A. Yu. Chursin, Hollow-Cathode Plasma Electron Devices (MÉI, Moscow, 2005) [in Russian].
V. A. Gordienko, A. E. Dubinov, S. S. Zhuravlev, et al., Fiz. Plazmy 31, 298 (2005) [Plasma Phys. Rep. 31, 266 (2005)].
J. C. Helmer and R. L. Jepsen, Tr. Inst. Radiotekh. Élektron., USSR Acad. Sci., No. 12, 2203 (1961) [Proc. Inst. Radio Eng. Electron. 49, 1920 (1961)].
N. V. Vasil’eva, N. V. Volkov, M. Z. Novgorodov, and N. N. Sobolev, Fiz. Plazmy 8, 619 (1982) [Sov. J. Plasma Phys. 8, 351 (1982)].
R. R. Arslanbekov, A. A. Kudryavtsev, and L. A. Movcham, IEEE Trans. Plasma Sci. 24, 1079 (1996).
Z. Donko, K. Rozha, and L. Shalai, Fiz. Plazmy 24, 637 (1998) [Plasma Phys. Rep. 24, 588 (1998)].
K. H. Schoenbach, R. Verhappen, T. Tessnow, et al., Appl. Phys. Lett. 68, 13 (1996).
H. Matsuzaki, Yu. Imahori, and T. Kamegava, J. Appl. Phys. 46, 4392 (1975).
S.-J. Park, J. Chen, C. Liu, and J. G. Eden, Appl. Phys. Lett. 78, 419 (2001).
M. F. Danilov and E. V. Kalashnikov, Teplofiz. Vys. Temp. 33, 663 (1995).
A. E. Dubinov, E. E. Dubinov, V. S. Zhdanov, et al., Pis’ma Zh. Tekh. Fiz. 26(20), 82 (2000) [Tech. Phys. Lett. 26, 932 (2000)].
G. Stockhausen and M. Kock, J. Phys. D 34, 1683 (2001).
J. Hildebrandt, J. Phys. D 16, 1023 (1983).
J. Hildebrandt, Phys. Lett. A 95, 365 (1983).
R. Singh, P. S. R. Prasad, J. K. Bhattacharjee, and R. K. Thareja, Phys. Lett. A 178, 284 (1993).
S. Glišić, A. I. Strinic, J. V. Živković, and Z. Lj. Petrović, IEEE Trans. Plasma Sci. 26, 1492 (1998).
A. V. Kozyrev and M. K. Makarov, in Proceedings of the Kreindel’ Seminar on Plasma Emission Electronics, Ulan-Ude, 2006, p. 37.
D. Arbel, Z. Bar-Lev, J. Felsteiner, et al., Phys. Rev. Lett. 71, 2919 (1993).
D. Arbel, Z. Bar-Lev, J. Felsteiner, et al., Appl. Phys. Lett. 66, 1193 (1995).
D. Arbel, Z. Bar-Lev, J. Felsteiner, et al., Phys. Rev. Lett. 78, 66 (1997).
J. Felsteiner, S. Ish-Shalom, and Ya. Z. Slutsker, J. Appl. Phys. 83, 2940 (1998).
Yu. P. Bliokh, J. Felsteiner, Ya. Z. Slutsker, and P. M. Vaisberg, IEEE Trans. Plasma Sci. 29, 895 (2001).
Yu. P. Bliokh, J. Felsteiner, and Ya. Z. Slutsker, Europhys. Lett. 46, 735 (1999).
D. V. Vyalykh, A. E. Dubinov, I. L. L’vov, et al., Prib. Tekh. Éksp., No. 1, 86 (2005) [Instrum. Exp. Tech. 48, 71 (2005)].
A. E. Dubinov, I. L. L’vov, S. A. Sadovoy, et al., Izv. Vyssh. Uchebn. Zaved., Radiofiz. 49, 300 (2006) [Radiophys. Quant. Electron., 49, 269 (2006)].
H. Eichhorn, K. H. Schoenbach, and T. Tessnow, Appl. Phys. Lett. 63, 2481 (1993).
I. I. Bakaleinik, in Problems of Low-Temperature Plasma Physics (Nauka i Tekhnika, Minsk, 1970), p. 232 [in Russian].
I. I. Bakaleinik, in Problems of Low-Temperature Plasma Physics (Nauka i Tekhnika, Minsk, 1970), p. 236 [in Russian].
J. Hildebrandt, J. Phys. D 39, 3625 (2006).
E. M. Oks, A. Anders, Ya. G. Braun, et al., Fiz. Plazmy 31, 1051 (2005) [Plasma Phys. Rep. 31, 978 (2005)].
I. Yu. Kostyukov and G. M. Fraiman, Izv. Vyssh. Uchebn. Zaved., Radiofiz. 46, 976 (2003) [Radiophys. Quant. Electron., 46, 873 (2003)].
G. S. Ramm, Microwave Triode Oscillators (Voenizdat, Moscow, 1955) [in Russian].
B. Agdur and U. Ternström, Phys. Rev. Lett. 13, 5 (1964).
C. Popovici, M. Somesan, and V. Nistor, Phys. Lett. A 22, 587 (1966).
G. V. Grekova, E. I. Lapshin, G. V. Okhmatovskii, and V. E. Slukin, Zh. Tekh. Fiz. 50, 2232 (1980) [Sov. Phys. Tech. Phys. 25, 1303 (1980)].
G. Schaefer and M. Wages, IEEE Trans. Plasma Sci. 16, 54 (1988).
R. P. Babertsyan, É. S. Badalyan, G. A. Egiazaryan, et al., Zh. Tekh. Fiz. 70(4), 24 (2000) [Tech. Phys. 45, 406 (2000)].
Yu. P. Raizer, Fundamentals of Modern Physics of Gas-Discharge Processes (Nauka, Moscow, 1980) [in Russian].
Ya. S. Itskhoki, Pulsed Devices (Sovetskoe Radio, Moscow, 1959) [in Russian].
Yu. D. Korolev and G. A. Mesyats, Cold-Emission and Explosion Processes in Gas Discharges (Nauka, Novosibirsk, 1982) [in Russian].
Electrical Breakdown of Gases, Ed. by J. M. Meek and J. D. Craggs (Wiley, New York, 1978; Inostrannaya Literatura, Moscow, 1980).
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Original Russian Text © S.V. Bulychev, D.V. Vyalykh, A.E. Dubinov, V.S. Zhdanov, I Yu. Kornilova, I.L. L’vov, S.K. Saikov, S.A. Sadovoy, V.D. Selemir, 2009, published in Fizika Plazmy, 2009, Vol. 35, No. 11, pp. 1019–1040.
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Bulychev, S.V., Vyalykh, D.V., Dubinov, A.E. et al. Study of high-power pulsed RF generators based on a hollow-cathode discharge. Plasma Phys. Rep. 35, 941–961 (2009). https://doi.org/10.1134/S1063780X09110051
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DOI: https://doi.org/10.1134/S1063780X09110051