Abstract
Results are presented from experimental studies of coagulation of dust grains of different sizes injected into a low-temperature plasma of an RF discharge in argon. A theoretical model describing the formation of dust clusters in a low-temperature plasma is developed and applied to interpret the results of experiments on the coagulation of dust grains having large negative charges. The grain size at which coagulation under the given plasma conditions is possible is estimated using the developed theory. The theoretical results are compared with the experimental data.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
M. P. Garrity, T. W. Peterson, and J. F. O’Hanlon, J. Vac. Sci. Technol. A14, 550 (1996).
K. Spears, T. Robinson, and R. Roth, IEEE Trans. Plasma Sci. 14, 179 (1986).
S. Hong, J. Berndt, and J. Winter, Plasma Sources Sci. Technol. 12, 46 (2003).
Y. Watanabe, J. Phys. D 39, R329 (2006).
M. Shiratani, H. Kawasaki, T. Fukuzawa, et al., J. Appl. Phys. 79, 104 (1996).
M. A. Olevanov, Yu. A. Mankelevich, and T. V. Rakhimova, Zh. éksp. Teor. Fiz. 125, 324 (2004) [JETP 98, 287 (2004)].
Yu. A. Mankelevich, M. A. Olevanov, and T. V. Rakhimova, Plasma Sources Sci. Technol. 17, 015013 (2008).
M. A. Olevanov, Yu. A. Mankelevich, and T. V. Rakhimova, Zh. Tekh. Fiz. 73(10), 51 (2003) [Tech. Phys. 48, 1270 (2003)].
Yu. A. Mankelevich, M. A. Olevanov, and T. V. Rakhimova, Zh. éksp. Teor. Fiz. 121, 1288 (2002) [JETP 94, 1106 (2002)].
Y. Watanabe, M. Shiratani, H. Kawasaki, et al., J. Vac. Sci. Technol. A14, 540 (1996).
B. Caussat and C. Vahlas, Chem. Vacuum Deposit. 13, 443 (2007).
H. Kersten, P. Schmetz, G. W. M. Kroesen, and D. B. Sartwell, Surf. Coat. Technol. 108, 507 (1998).
A. S. Ivanov, A. F. Pal, A. N. Ryabinkin, et al., in Plasma Processes and Polymers, Ed. by R. d’Agostino, P. Favia, C. Oehr, and M. Wertheimer (Wiley, Berlin, 2005), p. 455.
I. A. Belov, A. S. Ivanov, D. A. Ivanov, et al., Zh. éksp. Teor. Fiz. 117, 105 (2000) [JETP 90, 93 (2000)].
I. A. Belov, A. S. Ivanov, A. F. Pal, et al., Phys. Lett. A 306, 52 (2002).
A. S. Ivanov, A. G. Leonov, A. F. Pal’, et al., http://zhurnal.ape.relarn.ru/articles/2007/065.pdf
C. Bohren and D. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, New York, 1983; Mir, Moscow, 1986).
R. L. Xu, Particle Characterization: Light Scattering Methods (Kluwer, Dordrecht, 2000).
M. A. Olevanov, Yu. A. Mankelevich, and T. V. Rakhimova, Zh. Éksp. Teor. Fiz. 123, 503 (2003) [JETP 96, 444 (2003)].
J. Goree, Plasma Sources Sci. Technol. 3, 400 (1994).
Author information
Authors and Affiliations
Additional information
Original Russian Text © Yu.A. Mankelevich, M.A. Olevanov, A.F. Pal’, T.V. Rakhimova, A.N. Ryabinkin, A.O. Serov, A.V. Filippov, 2009, published in Fizika Plazmy, 2009, Vol. 35, No. 3, pp. 219–228.
Rights and permissions
About this article
Cite this article
Mankelevich, Y.A., Olevanov, M.A., Pal’, A.F. et al. Coagulation of dust grains in the plasma of an RF discharge in argon. Plasma Phys. Rep. 35, 191–199 (2009). https://doi.org/10.1134/S1063780X09030027
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063780X09030027