Abstract
Microwave gas discharges excited near a dielectric surface are investigated. Such discharges can exist over a broad range of gas pressures and thereby can be used to solve a wide variety of applied problems. The wave dispersion properties favorable for discharge excitation are analyzed, and a kinetic discharge model is considered that can be used to calculate the discharge parameters. A model of a steady discharge at gas pressures of 102–104 Pa is constructed.
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Original Russian Text © S.A. Dvinin, V.M. Shibkov, V.V. Mikheev, 2006, published in Fizika Plazmy, 2006, Vol. 32, No. 7, pp. 654–665.
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Dvinin, S.A., Shibkov, V.M. & Mikheev, V.V. On the theory of microwave discharges excited on the surface of a dielectric antenna. Plasma Phys. Rep. 32, 601–611 (2006). https://doi.org/10.1134/S1063780X06070099
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DOI: https://doi.org/10.1134/S1063780X06070099