Abstract
A cluster model of the mechanism of sensitivity to gases is proposed, according to which the change in the electric capacity of a MIS sensor under the action of gas is caused by a change in the dielectric constant of the metal — dielectric transition layer under the action of gas molecules. The dielectric constant of the transition layer changes due to the rearrangement of the electronic structure of the traps.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
I. Lundstrom, M. S. Shivaraman, C. Svensson, and L. Lundkvist, Appl. Phys. Lett. 26, 55 (1975).
M. S. Shivaraman, J. Appl. Phys. 28 (8) (1976).
F. Winquist, A. Spetz, M. Armgarth, C. Nylander, and I. Lundstrom, Appl. Phys. Lett. 43 (1983).
H. Dannetun and L. G. Petersson, J. Appl. Phys. 66 (3) (1989).
K. Dobos, D. Krey, and G. Zimmer, in Proceedings of the International Meeting on Chemical Sensors (Fukuoka, Japan, 1983).
I. Lundstrom, H. Sundgren, F. Winquist, M. Eriksson, C. Krantz-Rulcker, and A. Lloyd-Spetz, Sens. Actuators, B 121, 247 (2007).
A. V. Litvinov and I. N. Nikolaev, Metrology, No. 8 (2005).
I. N. Nikolaev and A. V. Litvinov, Meas. Equipment, No. 2 (2006).
I. N. Nikolaev, A. V. Litvinov, and E. V. Emelin, Datchiki Sist., No. 7 (2006).
Yu. A. Bykovsky and S. M. Silnov, MEPhI Preprint No. 004–86 (MEPhI, Moscow, 1986), p. 23.
Ye. V. Zhovanik and I. N. Nikolayev, Fiz. Khim. Obrab. Mater., No. 6, 42 (1998).
I. N. Nikolaev, L. N. Kalinina, and A. V. Litvinov, Phys. Solid State 51, 1124 (2009).
Ye. V. Zhovanik, R. M. Imamov, A. A. Lomov, I. N. Nikolaev, D. G. Stavkin, and V. M. Shevlyuga, Fiz. Khim. Obrab. Mater., No. 5 (1998).
Ye. V. Zhovanik, V. S. Kulikauskas, and I. N. Nikolaev, Fiz. Khim. Obrab. Mater., No. 6 (1998).
L. N. Kalinina, A. V. Litvinov, and I. N. Nikolaev, Datchiki Sist., No. 2 (2011).
O. Safonova, I. Bezverkhy, P. Fabrichnyi, M. Rumyantseva, and A. Gaskov, J. Mater. Chem., No. 12 (2002).
M. Gaidi, J. L. Hazemann, I. Matko, B. Chenevier, M. Rumyantseva, A. Gaskov, and M. Labeau, J. Electrochem. Soc. 147 (2000).
Funding
This work was supported by the Russian Science Foundation (Grant Agreement 18-79-10230 of August 08, 2018).
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
The authors declare that they have no conflicts of interest.
Additional information
Russian Text © The Author(s), 2019, published in Yadernaya Fizika i Inzhiniring, 2019, Vol. 10, No. 2.
Rights and permissions
About this article
Cite this article
Litvinov, A.V., Samotaev, N.N., Etrekova, M.O. et al. Cluster Model of the Mechanism of Sensitivity of Gas Sensors Based on MIS Structures. Phys. Atom. Nuclei 82, 1499–1502 (2019). https://doi.org/10.1134/S1063778819110115
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063778819110115