Abstract
A comparative study of ZrSiB coatings obtained by magnetron sputtering with the use of cathodes of different phase composition is carried out. The optimal compositions from the point of view of maximum heat resistance are revealed.
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Funding
This study was carried out under financial support of the Russian Foundation for Basic Research (project no. 19-08-00187).
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Russian Text © The Author(s), 2019, published in Yadernaya Fizika i Inzhiniring, 2019, Vol. 10, No. 2.
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Kiryukhantsev-Korneev, F.V., Yatsyuk, I.V. Study of ZrSiB Coatings Obtained by Magnetron Sputtering of ZrB2-20%Si and ZrB2-50%ZrSi2 Cathodes. Phys. Atom. Nuclei 82, 1437–1440 (2019). https://doi.org/10.1134/S1063778819110073
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DOI: https://doi.org/10.1134/S1063778819110073