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Mechanical Properties of Diamond-Like Silicon–Carbon Films Doped with Vanadium

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Abstract—

The influence of doping with vanadium on the mechanical properties of nanocomposite films deposited on silicon substrates has been investigated. It is found that the material tested is more likely brittle rather than plastic and that the hardness and elastic modulus of an undoped film are somewhat higher than those of vanadium-doped ones. With an increase in the Poisson ratio from 0.2 to 0.3, the hardness HIT of undoped sample increases by 14%, and the elastic modulus EIT decreases by 3.5%. Doping films with vanadium leads to a monotonic decrease in the elastic modulus EIT. The concentration dependence of microhardness HIT is complex: its minimum is observed at 8.8 at % V. It is established that the parameter of relative elastic strain energy of samples under indentation under investigation (ηIT) depends only slightly on film’s Poisson ratio.

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Funding

This study was supported by the Ministry of Science and Higher Education of the Russian Federation within the State assignment for the Federal Scientific Research Centre “Crystallography and Photonics” of the Russian Academy of Sciences in the part concerning X-ray fluorescence spectroscopy and study of defects on the sample surface and by the State assignment of the Ministry of Science and Higher Education of the Russian Federation (project no. FNER-2019-0001) in the part concerning mechanical tests.

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Correspondence to I. G. Dyachkova.

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Translated by Yu. Sin’kov

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Vinogradov, A.N., Dyachkova, I.G., Mamontov, A.V. et al. Mechanical Properties of Diamond-Like Silicon–Carbon Films Doped with Vanadium. Crystallogr. Rep. 65, 1002–1007 (2020). https://doi.org/10.1134/S106377452006036X

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  • DOI: https://doi.org/10.1134/S106377452006036X

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