Abstract
The phase composition and specific features of the microstructures of layers in the Pb(Zr0.52Ti0.48)O3–LaNiO3–Si and Pb(Zr0.52Ti0.48)O3–LaNiO3–SiOx–Si compositions grown by chemical vapor deposition from solutions have been investigated by high-resolution transmission electron microscopy, electron diffraction, and energy-dispersive analysis. The influence of the structure of the lower LaNiO3 electrode on the structure and properties of ferroelectric lead zirconate titanate films with a perovskite structure is studied. It is shown that the misoriented porous polycrystalline structure of the lower electrode leads to violation of the columnarity of perovskite grains. The electrical parameters are slightly deteriorated in comparison with a conventional platinum electrode. The structures of the thin films with a silicate sublayer under the LaNiO3 electrode and without it are compared.
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ACKNOWLEDGMENTS
The structural investigations were performed using equipment of the Shared Equipment Center of the Federal Scientific Research Centre “Crystallography and Photonics” (Russian Academy of Sciences). Film samples were prepared at the Russian Technological University “MIREA.”
Funding
This study was supported by the Ministry of Science and Higher Education of the Russian Federation within a State assignment for the Federal Scientific Research Centre “Crystallography and Photonics” of the Russian Academy of Sciences in the part concerning the structural investigations and within the project part of State assignment for research contract no. 11.2259.2017/4.6 in the part concerning the preparation of film samples.
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Translated by A. Sin’kov
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Zhigalina, O.M., Atanova, A.V., Khmelenin, D.N. et al. Structural Features and Mutual Influence of the Layers in PZT–LNO–SiOx–Si and PZT–LNO–Si Compositions. Crystallogr. Rep. 64, 961–967 (2019). https://doi.org/10.1134/S1063774519060282
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DOI: https://doi.org/10.1134/S1063774519060282