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Growth of crystalline ZnO films on the nitridated (0001) sapphire surface

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Abstract

The surface morphology and structure of (0001) sapphire substrates subjected to thermochemical nitridation in a mixture of N2, СО, and Н2 gases are investigated by electron and probe microscopy and X-ray and electron diffraction. It is shown that an aluminum nitride layer is formed on the substrate surface and heteroepitaxial ZnO films deposited onto such substrates by magnetron sputtering have a higher quality when compared with films grown on sapphire.

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Moscow, 119333, Russia

    A. V. Butashin, V. M. Kanevsky, A. E. Muslimov, P. A. Prosekov, O. A. Kondratev, A. E. Blagov, A. L. Vasil’ev & E. V. Rakova

  2. Dagestan State University, Makhachkala, 367000, Russia

    V. A. Babaev & A. M. Ismailov

  3. Institute for Single Crystals, National Academy of Sciences of Ukraine, Kharkov, 61103, Ukraine

    E. A. Vovk & S. V. Nizhankovsky

  4. National Research Centre “Kurchatov Institute”, pl. Akademika Kurchatova 1, Moscow, 123182, Russia

    P. A. Prosekov, O. A. Kondratev, A. E. Blagov & A. L. Vasil’ev

Authors
  1. A. V. Butashin
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  2. V. M. Kanevsky
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  3. A. E. Muslimov
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  4. P. A. Prosekov
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  5. O. A. Kondratev
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  6. A. E. Blagov
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  7. A. L. Vasil’ev
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  8. E. V. Rakova
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  9. V. A. Babaev
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  10. A. M. Ismailov
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  11. E. A. Vovk
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  12. S. V. Nizhankovsky
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Corresponding author

Correspondence to A. E. Muslimov.

Additional information

Original Russian Text © A.V. Butashin, V.M. Kanevsky, A.E. Muslimov, P.A. Prosekov, O.A. Kondratev, A.E. Blagov, A.L. Vasil’ev, E.V. Rakova, V.A. Babaev, A.M. Ismailov, E.A. Vovk, S.V. Nizhankovsky, 2015, published in Kristallografiya, 2015, Vol. 60, No. 4, pp. 620–624.

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Butashin, A.V., Kanevsky, V.M., Muslimov, A.E. et al. Growth of crystalline ZnO films on the nitridated (0001) sapphire surface. Crystallogr. Rep. 60, 565–569 (2015). https://doi.org/10.1134/S1063774515040094

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  • DOI: https://doi.org/10.1134/S1063774515040094

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