Crystallography Reports

, Volume 60, Issue 4, pp 565–569 | Cite as

Growth of crystalline ZnO films on the nitridated (0001) sapphire surface

  • A. V. Butashin
  • V. M. Kanevsky
  • A. E. Muslimov
  • P. A. Prosekov
  • O. A. Kondratev
  • A. E. Blagov
  • A. L. Vasil’ev
  • E. V. Rakova
  • V. A. Babaev
  • A. M. Ismailov
  • E. A. Vovk
  • S. V. Nizhankovsky
Surface and Thin Films

Abstract

The surface morphology and structure of (0001) sapphire substrates subjected to thermochemical nitridation in a mixture of N2, СО, and Н2 gases are investigated by electron and probe microscopy and X-ray and electron diffraction. It is shown that an aluminum nitride layer is formed on the substrate surface and heteroepitaxial ZnO films deposited onto such substrates by magnetron sputtering have a higher quality when compared with films grown on sapphire.

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Copyright information

© Pleiades Publishing, Inc. 2015

Authors and Affiliations

  • A. V. Butashin
    • 1
  • V. M. Kanevsky
    • 1
  • A. E. Muslimov
    • 1
  • P. A. Prosekov
    • 1
    • 4
  • O. A. Kondratev
    • 1
    • 4
  • A. E. Blagov
    • 1
    • 4
  • A. L. Vasil’ev
    • 1
    • 4
  • E. V. Rakova
    • 1
  • V. A. Babaev
    • 2
  • A. M. Ismailov
    • 2
  • E. A. Vovk
    • 3
  • S. V. Nizhankovsky
    • 3
  1. 1.Shubnikov Institute of CrystallographyRussian Academy of SciencesMoscowRussia
  2. 2.Dagestan State UniversityMakhachkalaRussia
  3. 3.Institute for Single CrystalsNational Academy of Sciences of UkraineKharkovUkraine
  4. 4.National Research Centre “Kurchatov Institute”MoscowRussia

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