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Structural and electrophysical properties of In0.52Al0.48As/In0.53Ga0.47As/In0.52Al0.48As/InP HEMT nanoheterostructures with different combinations of InAs and GaAs inserts in quantum well

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Abstract

A complex investigation of structural and electrical properties of In0.52Al0.48As/In y Ga1 − y As/In0.52Al0.48As nanoheterostructures on InP substrates containing thin InAs and GaAs inserts in a quantum well (QW) has been performed. The GaAs nanolayers are grown at the QW boundaries between InGaAs and InAlAs layers, while the double InAs inserts are grown in InGaAs layers symmetrically with respect to the QW center. The layer and interface structures have been studied by transmission electron microscopy. It is shown that, when using the proposed epitaxial growth conditions, the introduction of ∼1.2-nm-thick InAs nanoinserts into the InGaAs QW and a ∼1-nm-thick GaAs nanobarrier at the QW boundaries does not induce structural defects. The diffusion of the InAlAs/InGaAs interface (2–3 monolayers) and InAs/InGaAs nanoinsert interface (1–2 monolayers) has been estimated. Measured Hall mobilities and electron concentrations in structures with different combinations of InAs and GaAs inserts have been analyzed using calculated energy band diagrams and electron density distributions. It is found that the photoluminescence spectra of the structures under study have differences caused by specific structural features of coupled QWs (specifically, the change in the In molar fraction due to InAs inserts and the change in the QW thickness due to GaAs transition barriers.

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Authors and Affiliations

  1. Institute of Ultrahigh Frequency Semiconductor Electronics, Russian Academy of Sciences, Nagornyi proezd 7(5), Moscow, 117105, Russia

    G. B. Galiev, R. M. Imamov, E. A. Klimov, A. N. Klochkov, D. V. Lavruhin, P. P. Maltsev & S. S. Pushkarev

  2. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333, Russia

    A. L. Vasiliev & R. M. Imamov

  3. National Research Centre “Kurchatov Institute”, pl. Akademika Kurchatova 1, Moscow, 123182, Russia

    A. L. Vasiliev & I. N. Trunkin

  4. National Research Nuclear University “MEPhI”, Kashirskoe sh. 31, Moscow, 115409, Russia

    I. S. Vasil’evskii

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  1. G. B. Galiev
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  2. A. L. Vasiliev
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  3. I. S. Vasil’evskii
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  4. R. M. Imamov
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  5. E. A. Klimov
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  6. A. N. Klochkov
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  7. D. V. Lavruhin
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  8. P. P. Maltsev
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  9. S. S. Pushkarev
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  10. I. N. Trunkin
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Correspondence to G. B. Galiev.

Additional information

Original Russian Text © G.B. Galiev, A.L. Vasiliev, I.S. Vasil’evskii, R.M. Imamov, E.A. Klimov, A.N. Klochkov, D.V. Lavruhin, P.P. Maltsev, S.S. Pushkarev, I.N. Trunkin, 2015, published in Kristallografiya, 2015, Vol. 60, No. 3, pp. 445–454.

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Galiev, G.B., Vasiliev, A.L., Vasil’evskii, I.S. et al. Structural and electrophysical properties of In0.52Al0.48As/In0.53Ga0.47As/In0.52Al0.48As/InP HEMT nanoheterostructures with different combinations of InAs and GaAs inserts in quantum well. Crystallogr. Rep. 60, 397–405 (2015). https://doi.org/10.1134/S1063774515030062

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