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Electrical and structural characteristics of metamorphic In0.38Al0.62As/In0.37Ga0.63As/In0.38Al0.62As HEMT nanoheterostructures

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Abstract

The influence of the metamorphic buffer design and epitaxial growth conditions on the electrical and structural characteristics of metamorphic In0.38Al0.62As/In0.37Ga0.63As/In0.38Al0.62As high electron mobility transistor (MHEMT) nanoheterostructures has been investigated. The samples were grown on GaAs(100) substrates by molecular beam epitaxy. The active regions of the nanoheterostructures are identical, while the metamorphic buffer In x Al1 − x As is formed with a linear or stepwise (by Δ x = 0.05) increase in the indium content over depth. It is found that MHEMT nanoheterostructures with a step metamorphic buffer have fewer defects and possess higher values of two-dimensional electron gas mobility at T = 77 K. The structures of the active region and metamorphic buffer have been thoroughly studied by transmission electron microscopy. It is shown that the relaxation of metamorphic buffer in the heterostructures under consideration is accompanied by the formation of structural defects of the following types: dislocations, microtwins, stacking faults, and wurtzite phase inclusions several nanometers in size.

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Authors and Affiliations

  1. Institute of Ultrahigh Frequency Semiconductor Electronics, Russian Academy of Sciences, Moscow, 117105, Russia

    G. B. Galiev, E. A. Klimov, A. N. Klochkov, P. P. Maltsev, S. S. Pushkarev & R. M. Imamov

  2. Shubnikov Institute of Crystallography, Russian Academy of Sciences, Leninskii pr. 59, Moscow, 119333, Russia

    O. M. Zhigalina, R. M. Imamov, A. N. Kuskova & D. N. Khmelenin

Authors
  1. G. B. Galiev
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  2. E. A. Klimov
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  3. A. N. Klochkov
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  4. P. P. Maltsev
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  5. S. S. Pushkarev
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  6. O. M. Zhigalina
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  7. R. M. Imamov
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  8. A. N. Kuskova
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  9. D. N. Khmelenin
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Correspondence to G. B. Galiev.

Additional information

Original Russian Text © G.B. Galiev, E.A. Klimov, A.N. Klochkov, P.P. Maltsev, S.S. Pushkarev, O.M. Zhigalina, R.M. Imamov, A.N. Kuskova, D.N. Khmelenin, 2013, published in Kristallografiya, 2013, Vol. 58, No. 6, pp. 916–921.

On the 70th Anniversary of the Shubnikov Institute of Crystallography of the Russian Academy of Sciences

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Galiev, G.B., Klimov, E.A., Klochkov, A.N. et al. Electrical and structural characteristics of metamorphic In0.38Al0.62As/In0.37Ga0.63As/In0.38Al0.62As HEMT nanoheterostructures. Crystallogr. Rep. 58, 914–919 (2013). https://doi.org/10.1134/S1063774513060114

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  • DOI: https://doi.org/10.1134/S1063774513060114

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