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Acoustic Resonance Spectroscopy with an Uncalibrated Microwave Path

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Abstract

Acoustic resonance spectroscopy (ARS) is an informative analytical method that yields information about thicknesses and acoustic properties of layers in a multilayer structure representing a high-overtone bulk acoustic wave resonator (HBAR). Since the HBAR spectrum has many resonance features, the development of automatic methods for its processing is an urgent task. In this study, a method for extracting ARS data from a signal distorted by a RF measuring path without additional measurements of reference impedances (calibration) is proposed, which brings the spectrum to a form convenient for automatic processing and significantly expands the range of the ARS application. The method is especially relevant for processing HBAR spectra with a low excitation efficiency. As an example of such processing, the central frequencies and effective widths of more than a thousand resonant peaks are determined and, based on this, the frequency dependence of the acoustic attenuation is established for a new material: optical ceramics based on doped yttrium aluminum garnet nanoparticles.

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Funding

This study was supported by the Ministry of Science and Higher Education of the Russian Federation as part of the state assignment.

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Authors and Affiliations

  1. Kotelnikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, 125009, Moscow, Russia

    S. G. Alekseev & N. I. Polzikova

  2. Kotelnikov Institute of Radio Engineering and Electronics (Fryazino Branch), Russian Academy of Sciences, 141120, Fryazino, Moscow region, Russia

    V. A. Luzanov, A. O. Raevsky, V. V. Balashov & K. V. Lopukhin

Authors
  1. S. G. Alekseev
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  2. V. A. Luzanov
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  3. A. O. Raevsky
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  4. V. V. Balashov
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  5. K. V. Lopukhin
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  6. N. I. Polzikova
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Corresponding author

Correspondence to S. G. Alekseev.

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The authors declare that they have no conflicts of interest.

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Translated by E. Bondareva

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Alekseev, S.G., Luzanov, V.A., Raevsky, A.O. et al. Acoustic Resonance Spectroscopy with an Uncalibrated Microwave Path. Acoust. Phys. 69, 40–47 (2023). https://doi.org/10.1134/S106377102206001X

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  • DOI: https://doi.org/10.1134/S106377102206001X

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