Abstract
We have implemented a 1D and 2D simulation of excitation and propagation of Lamb waves in Al/AlN/(100)-diamond and Al-IDT/AlN/(100)-diamond piezoelectric layered structures (the last in a SAW resonator configuration), respectively. The distribution of elastic displacements in Lamb waves of different orders has been calculated, the mode types have been identified, and the dispersion dependences of the phase velocities have been studied including the excitation at ultrahigh frequencies. The phase velocity values calculated using the 1D and 2D models are in good agreement with those determined experimentally. We have shown that, above a synchronism frequency of an IDT, resonances which occur in these structures, are determined by excitation of Lamb waves in a substrate. The quality factor of these resonances is extremely higher than that on surface acoustic waves. This is confirmed by the experimental data. The amplitude-frequency responses and frequency dependences of the quality factor calculated using the 2D model are in good agreement with the experiment.
Similar content being viewed by others
REFERENCES
B. P. Sorokin, G. M. Kvashnin, A. V. Telichko, G. I. Gordeev, S. I. Burkov, and V. D. Blank, Acoust. Phys. 61 (4), 422 (2015).
B. P. Sorokin, G. M. Kvashnin, A. S. Novoselov, V. S. Bormashov, A. V. Golovanov, S. I. Burkov, and V. D. Blank, Ultrasonics 78, 162 (2017).
B. P. Sorokin, A. S. Novoselov, G. M. Kvashnin, N. V. Luparev, N. O. Asafiev, A. B. Shipilov, and V. V. Aksenenkov, Acoust. Phys. 65 (3), 263 (2019).
E. Anderås, I. Katardjiev, and V. Yantchev, J. Micromech. Microeng. 21, 85010 (2011).
H. Lamb, Proc. R. Soc. A 93, 114 (1917).
I. A. Viktorov, Physical Foundations of Rayleigh and Lamb Ultrasonic Waves Application (Nauka, Moscow, 1966) [in Russian].
S. I. Burkov, O. P. Zolotova, B. P. Sorokin, P. P. Turchin, and V. S. Talismanov, J. Acoust. Soc. Am. 143, 16 (2018).
Y. Jin and S. G. Joshi, IEEE Trans. Ultrason., Ferroelectr. Freq. Control 41, 279 (1994).
Y. Jin and S. G. Joshi, IEEE Trans. Ultrason., Ferroelectr. Freq. Control 43, 491 (1996).
I. A. Borodina, S. G. Joshi, B. D. Zaitsev, and I. E. Kuznetsova, Acoust. Phys. 46 (1), 33 (2000).
S. G. Joshi, B. D. Zaitsev, and I. E. Kuznetsova, Acoust. Phys. 47 (3), 282 (2001).
I. E. Kuznetsova, B. D. Zaitsev, S. G. Joshi, and I. A. Borodina, IEEE Trans. Ultrason., Ferroelectr. Freq. Control 48, 322 (2001).
I. E. Kuznetsova, B. D. Zaitsev, I. A. Borodina, A. A. Teplyh, V. V. Shurygin, and S. G. Joshi, Ultrasonics 42, 179 (2004).
B. D. Zaitsev, I. E. Kuznetsova, I. A. Borodina, and S. G. Joshi, Ultrasonics 39, 51 (2001).
V. I. Anisimkin, Acoust. Phys. 62 (2), 165 (2016).
V. I. Anisimkin, E. Verona, A. S. Kuznetsova, and V. A. Osipenko, Acoust. Phys. 65 (2), 171 (2019).
V. Yantchev and I. Katardjiev, J. Micromech. Microeng. 23, 043001 (2013).
T. Kimura, M. Omura, Y. Kishimoto, and K. Hashimoto, IEEE Trans. Microwave Theory Tech. 67, 915 (2019).
F. Laidoudi, F. Boubenider, M. Mebarki, F. Medjili, and F. Bettine, Acoust. Phys. 65 (3), 253 (2019).
V. Plessky, S. Yandrapalli, P. J. Turner, L. G. Villanueva, J. Koskela, and R. B. Hammond, Electron. Lett. 55 (2), 98 (2019).
G. Kvashnin, B. Sorokin, and S. Burkov, in Proc. 2020 Joint Conf. of the IEEE Int. Frequency Control Symp. and Int. Symp. on Applications of Ferroelectrics (IFCS-ISAF) (Keystone, CO, 2020), p. 1.
G. M. Kvashnin, B. P. Sorokin, and S. I. Burkov, Acoust. Phys. 67 (1), 38 (2021).
A. V. Sotnikov, H. Schmidt, M. Weihnacht, T. Yu. Chemekova, and Yu. N. Makarov, IEEE Trans. Ultrason., Ferroelectr. Freq. Control 57, 808 (2010).
G. D. Mansfeld, S. G. Alekseev, and I. M. Kotelyansky, in Proc. IEEE Ultrasonic Symp. (Atlanta, GA, 2001).
G. I. Gordeev, G. M. Kvashnin, M. S. Kuznetsov, B. P. Sorokin, and A. V. Telichko, Izv. Vyssh. Uchebn. Zaved., Khim. Khim. Tekhnol. 56 (7), 50 (2013).
E. Dieulesaint and D. Royer, Elastic Waves in Solids (Wiley, New York, 1980; Nauka, Moscow, 1982).
Author information
Authors and Affiliations
Corresponding authors
Rights and permissions
About this article
Cite this article
Kvashnin, G.M., Sorokin, B.P. & Burkov, S.I. Study of Propagation of Microwave Lamb Waves in a Piezoelectric Layered Structure. Acoust. Phys. 67, 590–596 (2021). https://doi.org/10.1134/S1063771021060051
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063771021060051