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Acoustic Wave Propagation Along Piezoelectric Plate Coated with Piezoelectric Films

  • PHYSICAL ACOUSTICS
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Abstract

A novel solid state structure consisting of piezoelectric plate sandwiched between two piezoelectric films is suggested as propagation medium for acoustic waves. Considering, as an example, quartz plate coated with AlN film and with AlN film together with ZnO film, the main characteristics of the Lamb and SH acoustic modes are numerically calculated and compared with each other. It is shown that i) the range of acoustic parameters achievable in structures is wider than that is for an uncoated plate, ii) generation of waves in the plate with one film is accomplished by 12 transducer configurations, while there are 32 configurations to excite the same waves in two film structure, iii) dispersion of the wave velocities and coupling constants depend on the mode order, mode type, film thickness, plate thickness, and transducer configuration. This property makes selection of appropriate modes more flexible. Results of calculations are partially verified experimentally.

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ACKNOWLEDGMENTS

The work has been partially supported by Russian Science Foundation Grant no. 15-19-20046-P in frame of fabrication and testing the layered structures and by Russian Foundation of Basic Research Grant no. 17-07-00750 in frame of theoretical analysis of the structures. The development of layered waveguides for acoustic sensors was partially performed in the framework of the state assignment of Kotelnikov IRE RAS. The work was also partially supported by Russian Foundation for Basic Research, project no. 17-07-00750 in the framework of theoretical analysis of the structures.

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Authors and Affiliations

  1. V.A. Kotel’nikov Institute of Radio Engineering and Electronic, Russian Academy of Sciences, 125009, Moscow, Russia

    V. I. Anisimkin, E. Verona & A. S. Kuznetsova

  2. Institute for Photonics and Nanotechnologies, Italian National Research Council (IFN‑CNR), I-00156 , Roma, Italy

    E. Verona

  3. Acoustoelectronics and Piezoceramic Elpa Corporation, 124460, Zelenograd, Moscow, Russia

    V. A. Osipenko

Authors
  1. V. I. Anisimkin
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  2. E. Verona
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  3. A. S. Kuznetsova
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  4. V. A. Osipenko
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Correspondence to V. I. Anisimkin.

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Anisimkin, V.I., Verona, E., Kuznetsova, A.S. et al. Acoustic Wave Propagation Along Piezoelectric Plate Coated with Piezoelectric Films. Acoust. Phys. 65, 171–177 (2019). https://doi.org/10.1134/S1063771019020027

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  • DOI: https://doi.org/10.1134/S1063771019020027

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