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Investigation of the Characteristics of a Wireless Communication System Consisting of Metal Nanoantennas in 50 µM TSV Channel

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Abstract

In this article challenges and potential solutions in the field of signal exchange between layers of a 3D integrated circuit (IC) using through silicon vias (TSVs) are discussed. The current technology uses copper channels, but it has limitations such as stress along the TSV joint and oxidation of copper during operation, which can affect the transmission characteristics and service life of the product. We propose a solution by replacing copper channels with nanophotonics technology, specifically optical antennas capable of wireless signal transmission. This technology has shown potential for high-speed data transmission with frequencies reaching hundreds of THz. A series of simulations was conducted in order to evaluate abilities of nanoantennas transmitter-receiver system to send data to a distance of 50 microns. Calculated results show, that wireless optical antennas communication system is able to send signal to such interval, but further studies are necessary to explore potential capabilities of dielectric and metal antennas in this area.

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REFERENCES

  1. Wang, Z., Microsystems using three-dimensional integration and TSV technologies: Fundamentals and applications, Microelectron. Eng., 2019, vol. 210, pp. 35–64. https://doi.org/10.1016/j.mee.2019.03.009

    Article  Google Scholar 

  2. Sanipini, V.K., Rakesh, B., Chamanthula, A.J., Santoshi, N., Gudivada, A.A., and Panigrahy, A.K., Mater. Today Proc., 2021, vol. 45, pp. 1742–1746. https://doi.org/10.1016/j.matpr.2020.08.621

    Article  Google Scholar 

  3. Chan, J.M., Lee, K.Ch., and Tan, Ch.S., Effects of copper migration on the reliability of through-silicon via (TSV), IEEE Trans. Device Mater. Reliab., 2018, vol. 18, no. 4, pp. 520–528. https://doi.org/10.1109/tdmr.2018.2880286

    Article  Google Scholar 

  4. Lau, J.H., Overview and outlook of through-silicon via (TSV) and 3D integrations, Microelectron. Int., 2011, vol. 28, no. 2, pp. 8–22. https://doi.org/10.1108/13565361111127304

    Article  Google Scholar 

  5. Wang, S., Wang, Q., Liu, Yu., Jia, L., Yu, M., Sun, P., Geng, F., Cai, Ya., and Tu, Z., Low-loss through silicon Vias (TSVs) and transmission lines for 3D optoelectronic integration, Microelectron. Eng., 2021, vol. 238, p. 111509. https://doi.org/10.1016/j.mee.2021.111509

    Article  Google Scholar 

  6. Giannini, V., Fernández-Domínguez, A.I., Heck, S.C., and Maier, S.A., Plasmonic nanoantennas: Fundamentals and their use in controlling the radiative properties of nanoemitters, Chem. Rev., 2011, vol. 111, no. 6, pp. 3888–3912. https://doi.org/10.1021/cr1002672

    Article  Google Scholar 

  7. Halberstein, J.H., Gain averages as criteria for antenna EMC-performance, 1972 IEEE Int. Electromagnetic Compatibility Symp. Record, Arlington Heights, Ill., 1972, IEEE, 1972, pp. 1–4. https://doi.org/10.1109/isemc.1972.7567696

  8. Pattanashetti, P. and Sarma, G.H., Simulation and analysis of through silicon via (TSV) based inductance structures, 2014 Int. Conf. on Advances in Electronics Computers and Communications, Bangalore, India, 2014, IEEE, 2014, pp. 1–6. https://doi.org/10.1109/icaecc.2014.7002482

  9. He, Ye., Chen, Ya., Zhang, L., Wong, S.-W., and Chen, Z.N., An overview of terahertz antennas, China Commun., 2020, vol. 17, no. 7, pp. 124–165. https://doi.org/10.23919/j.cc.2020.07.011

    Article  Google Scholar 

  10. Helena, D., Ramos, A., Varum, T., and Matos, J.N., Antenna design using modern additive manufacturing technology: A review, IEEE Access, 2020, vol. 8, pp. 177 064–177 083. https://doi.org/10.1109/access.2020.3027383

    Article  Google Scholar 

  11. Serov, D.A. and Khorin, I.A., Simulation of a system of nanoantennas located in a TSV channel as a system for receiving and transmitting data, Russ. Microelectron., 2023, vol. 52, no. 3, pp. 198–204. https://doi.org/10.1134/s1063739723700385

    Article  Google Scholar 

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This work was supported by ongoing institutional funding. No additional grants to carry out or direct this particular research were obtained.

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Correspondence to D. A. Serov or I. A. Khorin.

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Serov, D.A., Khorin, I.A. Investigation of the Characteristics of a Wireless Communication System Consisting of Metal Nanoantennas in 50 µM TSV Channel. Russ Microelectron 52 (Suppl 1), S151–S158 (2023). https://doi.org/10.1134/S1063739723600279

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  • DOI: https://doi.org/10.1134/S1063739723600279

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