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Informational Analytical Platform for Operating the Technological Route of Manufacturing of Microelectronic Devices

  • TECHNOLOGIES: GENERAL PROCESSES
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Abstract—

The article describes the project of the JSC Research Institute “Submicron” of development an informational analytical platform for operating the technological route. A database containing a list of serial numbers and product names, all operations along the technological route, users who have access to information about production processes has been created. The advantages of implementing this management information system at the enterprise are explained. The possibilities of tracking the history—dates and times of all operations of the technological route with indication of exact department and responsible person at the current time are shown.

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Funding

This work was supported by ongoing institutional funding. No additional grants to carry out or direct this particular research were obtained.

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Authors and Affiliations

  1. Joint-stock company Research Institute “Submicron”, 124498, Zelenograd, Russia

    K. S. Balizh, A. V. Dobrodeev, N. V. Ermakov, I. A. Orlov & E. A. Simakhina

Authors
  1. K. S. Balizh
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  2. A. V. Dobrodeev
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  3. N. V. Ermakov
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  4. I. A. Orlov
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  5. E. A. Simakhina
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Corresponding authors

Correspondence to K. S. Balizh or E. A. Simakhina.

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Balizh, K.S., Dobrodeev, A.V., Ermakov, N.V. et al. Informational Analytical Platform for Operating the Technological Route of Manufacturing of Microelectronic Devices. Russ Microelectron 52 (Suppl 1), S163–S167 (2023). https://doi.org/10.1134/S1063739723600267

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  • DOI: https://doi.org/10.1134/S1063739723600267

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