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Russian Microelectronics

, Volume 47, Issue 2, pp 95–103 | Cite as

Electrophysical Parameters and Radiation Spectra of Boron Trichloride Plasma

  • D. B. Murin
  • A. V. Dunaev
Article
  • 9 Downloads

Abstract

The electrophysical parameters and radiation spectrum of BCl3 plasma under a DC glow discharge are analyzed. Data on the gas temperature and reduced electrical field intensity are obtained. It is established that the reduced electrical field intensity in BCl3 plasma practically does not depend on the discharge current (under a constant pressure); moreover, it appreciably decreases with an increase in the gas pressure (under a constant discharge current). It is revealed that a linear increase in the gas temperature with increasing pressure is caused by increasing the specific power expended in the discharge. The radiation spectra of BCl3 plasma are presented by atomic and molecular components. It is established that with a growth in the current the radiation intensity increases linearly, which corresponds to the mechanism of direct excitation of radiating states under an electronic impact and it is evidence of a lack of secondary processes.

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Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  1. 1.Ivanovo State University of Chemistry and TechnologyIvanovoRussia

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