The results of developing the technology of magnetron sputtering deposition of a LiPON solid electrolyte and an experimental investigation of its characteristics are presented. The basic processing operations and parameters providing the formation of films of the proper morphology, structure, and elemental and phase composition are described. The data of the measurement of the physical parameters of the films by cyclic voltammetry and potentiometry are represented.
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Bates, J.B., Dudney, N.J., Gruzalski, G.R., Zuhr, R.A., Choudhury, A., Luck, C.F., and Robertson, J.D., Electrical properties of amorphous lithium electrolyte thin films, Solid State Ionics, 1992, vols. 53–56, p.647.
Bates, J.B., Dudney, N.J., Gruzalski, G.R., Zuhr, R.A., Choudhury, A., Luck, C.F., and Robertson, J.D., Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin-film batteries, Power Sources, 1993, vols. 43–44, p.103.
Xiaohua, Yu., Bates, J.B., and Jellison, G.E., Characterization of lithium phosphorous oxynitride thin films, in Proceedings of the Symposium on Thin Film Solid Ionic Devices and Materials, 1995, vols. 95–22, pp. 23–30.
Xiaohua, Yu., Bates, J.B., Jellison, G.E., and Hart, F.X., A stable thin-film lithium electrolyte: lithium phosphorus oxynitride, Electrochem. Soc., 1997, vol. 144, no. 2, pp. 524–532.
Ho Young Park, Sang Cheol Nam, Young Chang Lim, Kyu Gil Choi, Ki Chang Lee, Gi Back Park, Seong-Rae Lee, Heesook Park Kim, and Sung Baek Cho, Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film, Electroceram., 2006, vol. 17, pp. 1023–1030.
Zongqian Hu, Dezhan Li, and Kai Xie, Influence of radio frequency power on structure and ionic conductivity of LiPON thin films, Bull. Mater. Sci., 2008, vol. 31, no. 4, pp. 681–686.
Nam-Seok Roh, Sang-Dong Lee, and Hyuk-Sang, Effects of depositon condition on the ionic conductivity and structure of amorphous lithium phosphorus oxynitrate thin film, Scripta Mater., 2000, vol. 42, pp. 43–49.
Yoon Gu Kima and Wadley, H.N.G., Lithium phosphorous oxynitride films synthesized by a plasmaassisted directed vapor deposition approach, J. Vac. Sci. Technol., vol. 26, no. 1, pp. 174–183.
Belous, A.G., V’yunova, O.I., Kovalenko, L.L., Bohnke, O., and Bohnke, C., Synthesis of thin-film electrodes based on LiPON and LiPON-LLTOLiPON, Russ. J. Electrochem., 2014, vol. 50, no. 6, pp. 523–530.
Grande, L., Zamory, J., Koch, S.L., Kalhoff, J., Paillard, E., and Passerini, S., Homogeneous lithium electrodeposition with pyrrolidinium-based ionic liquid electrolytes, ACS Appl. Mater. Interfaces, 2015, vol. 7, no. 10, pp. 5950–5958.
Original Russian Text © S.V. Vasilev, M.E. Lebedev, L.A. Mazaletskii, A.V. Metlitskaya, A.A. Mironenko, V.V. Naumov, A.V. Novozhilova, A.S. Rudyi, I.S. Fedorov, 2017, published in Mikroelektronika, 2017, Vol. 46, No. 6.
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Vasilev, S.V., Lebedev, M.E., Mazaletskii, L.A. et al. Development of the Technology of Magnetron Sputtering Deposition of LiPON Films and Investigation of Their Characteristics. Russ Microelectron 46, 424–432 (2017). https://doi.org/10.1134/S1063739717060099