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Russian Microelectronics

, Volume 45, Issue 4, pp 285–291 | Cite as

Thin film negative electrode based on silicon composite for lithium-ion batteries

  • A. A. Airapetov
  • S. V. Vasiliev
  • T. L. Kulova
  • M. E. Lebedev
  • A. V. Metlitskaya
  • A. A. Mironenko
  • N. F. Nikol’skaya
  • V. V. Odinokov
  • G. Ya. Pavlov
  • D. E. Pukhov
  • A. S. RudyiEmail author
  • A. M. Skundin
  • V. A. Sologub
  • I. S. Fedorov
  • A. B. Churilov
Article
  • 41 Downloads

Abstract

The experimental results concerning the elaboration of the technology used to manufacture thin film negative electrodes for lithium-ion batteries based on Si–O–Al–Zn composites have been presented. The regimes of sputtering and the possibilities of controlling the structure and phase composition of the films, the methods used for the diagnostics of the structure and phase composition of the films, and the results of the electrochemical tests of the negative electrodes have been described.

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Copyright information

© Pleiades Publishing, Ltd. 2016

Authors and Affiliations

  • A. A. Airapetov
    • 4
  • S. V. Vasiliev
    • 1
    • 2
  • T. L. Kulova
    • 3
  • M. E. Lebedev
    • 1
    • 2
  • A. V. Metlitskaya
    • 1
    • 2
  • A. A. Mironenko
    • 2
  • N. F. Nikol’skaya
    • 3
  • V. V. Odinokov
    • 4
  • G. Ya. Pavlov
    • 4
  • D. E. Pukhov
    • 2
  • A. S. Rudyi
    • 1
    • 2
    Email author
  • A. M. Skundin
    • 3
  • V. A. Sologub
    • 4
  • I. S. Fedorov
    • 1
  • A. B. Churilov
    • 1
    • 2
  1. 1.Demidov Yaroslavl State UniversityYaroslavlRussia
  2. 2.Institute of Physics and Technology, Yaroslavl BranchRussian Academy of SciencesYaroslavlRussia
  3. 3.Frumkin Institute of Physical Chemistry and ElectrochemistryRussian Academy of SciencesMoscowRussia
  4. 4.Public Corporation Research Institute of Precision Machine ManufacturingZelenogradRussia

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