Abstract
The article presents the design of a silicon crystal matrix of the pressure of tensoresistive sensitive elements of the MIPD-32 for intelligent robotic systems having a function of tactile feel. The experimental data on the sensitivity of the tensoconverters were represented.
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Original Russian Text © D.V. Gusev, R.S. Litvinenko, V.S. Sukhanov, 2015, published in Mikroelektronika, 2015, Vol. 44, No. 6, pp. 472–475.
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Gusev, D.V., Litvinenko, R.S. & Sukhanov, V.S. Development of crystal matrix of tensoresistive pressure tactile transducers for robotics. Russ Microelectron 44, 421–424 (2015). https://doi.org/10.1134/S1063739715050054
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DOI: https://doi.org/10.1134/S1063739715050054