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Development of crystal matrix of tensoresistive pressure tactile transducers for robotics

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Abstract

The article presents the design of a silicon crystal matrix of the pressure of tensoresistive sensitive elements of the MIPD-32 for intelligent robotic systems having a function of tactile feel. The experimental data on the sensitivity of the tensoconverters were represented.

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References

  1. Sadovnichii, V.A., Sokolov, M.E., Makarovets, N.A., Budanov, V.M., and Podol’skii, V.E., Mekhanoretseptornaya taktil’naya diagnostika i taktil’naya translyatsiya v endoskopicheskoi khirurgii (The Mechanoreceptor Tactile Diagnostics and Tactile Broadcast in Endoscopic Surgery), Moscow: Geotar-Media, 2012, pp. 127–149.

    Google Scholar 

  2. Sokhanvar, S., Dargahi, J., Najarian, S., and Arbatani, S., Tactile Sensing and Displays, New York: Wiley, 2013, pp. 23–34.

    Google Scholar 

  3. Dahiya, R.S., Metta, G., Valle, M., and Sandini, G., Tactile sensing—from humans to humanoids, Ieee Trans. Robotics, 2010, vol. 26, no. 1, pp. 1–20.

    Article  Google Scholar 

  4. Amelichev, V.V., Budanov, V.M., Gusev, D.V., Mikhailov, Yu.A., Sokolov, M.E., Sukhanov, V.S., and Tikhonov, R.D., Design and technology of creation of matrixes of pressure converters for tactile endoscopy sensors, NanoMikrosist. Tekh., 2012, no. 11, pp. 27–30.

    Google Scholar 

  5. Ignat’eva, E.V., Mikhailov, Yu.A., and Timoshenkov, S.P., On the structural design of membrane with solid center of silicon pressure strain transducer in range from 0.025 to 25 MPa, NanoMikrosist. Tekh., 2010, no. 2, pp. 24–31.

    Google Scholar 

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Correspondence to D. V. Gusev.

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Original Russian Text © D.V. Gusev, R.S. Litvinenko, V.S. Sukhanov, 2015, published in Mikroelektronika, 2015, Vol. 44, No. 6, pp. 472–475.

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Gusev, D.V., Litvinenko, R.S. & Sukhanov, V.S. Development of crystal matrix of tensoresistive pressure tactile transducers for robotics. Russ Microelectron 44, 421–424 (2015). https://doi.org/10.1134/S1063739715050054

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  • DOI: https://doi.org/10.1134/S1063739715050054

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