Russian Microelectronics

, Volume 40, Issue 2, pp 98–107 | Cite as

Simulation of formation of nanostructures during sputtering of the surface by ion bombardment

  • A. S. RudyiEmail author
  • A. N. Kulikov
  • A. V. Metlitskaya
Modeling of Production Processes and Elements of Equipment


The results of the investigation of a spatially nonlocal model of surface erosion by the ion bombardment are presented. It is shown that the equilibrium states of the surface in the scope of the model are the plane and a terrace-like profile. Critical values of the bombardment angle and surface diffusion, at which the equilibrium states are lost to perturbations in the form of traveling waves, are determined. The obtained results allow us to explain the main form of the surface topography formed during ion sputtering of the surface, and to determine their parameters, the existence region, and the sequence of appearance.


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  1. 1.
    Smirnov, V.K., Kibalov, D.S., Orlov, O.M., and Graboshnikov, V.V., Technology for Nanoperiodic Doping of a Metal-Oxide-Semiconductor Field-Effect Transistor Channel Using a Self-Forming Wave-Ordered Structure, Nanotecnology, 2003, vol. 14, pp. 709–715.CrossRefGoogle Scholar
  2. 2.
    Sigmund, P., A Mechanism of Surface Micro-Roughening by Ion Bombardment, J. Mater. Sci., 1973, vol. 8, pp. 1545–1553.CrossRefGoogle Scholar
  3. 3.
    Bradley, R.M. and Harper, J.M.F., Theory of Ripple Topography Induced by Ion Bombardment, J. Vac. Sci. Technol. A, 1988, vol. 6, pp. 2390–2395.CrossRefGoogle Scholar
  4. 4.
    Carter, G., The Physics and Applications of Ion Beam Erosion, J. Phys. D: Appl. Phys, 2001, vol. 34 R.Google Scholar
  5. 5.
    Birkgan, S.E., Bachurin, V.I., Rudy, A.S., and Smirnov, V.K., Nanoscale Model of Surface Erosion by Ion Bombardment, Rad. Eff. & Def. in Sol., 2004, vol. 159, no. 6, pp. 319–329.Google Scholar
  6. 6.
    Rudyi, A.S. and Bachurin, V.I., A Spatially Nonlocal Model of Erosion of the Surface by Ion Bombardment, Izv. Ross. Akad. Nauk, Ser. Fiz., 2008, vol. 72, no. 5, pp. 624–629.Google Scholar
  7. 7.
    Kibalov, D.S., Wave-Like Nanostructures on the Surface of Silicon Initiated by the Ion Bombardment, Extended Abstract of the Doctoral (Phys.-Math.) Dissertation, Moscow, 2005.Google Scholar
  8. 8.
    Sobolev, S.L., Nekotorye primeneniya funktsional’nogo analiza v matematicheskoi fizike (Certain Applications of the Functional Analysis in Mathematical Physics, LGU, 1950, p. 256.Google Scholar

Copyright information

© Pleiades Publishing, Ltd. 2011

Authors and Affiliations

  • A. S. Rudyi
    • 1
    Email author
  • A. N. Kulikov
    • 1
  • A. V. Metlitskaya
    • 1
  1. 1.Yaroslavl State UniversityYaroslavlRussia

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