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Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies

Russian Microelectronics volume 38, pages 320–326 (2009)Cite this article

Abstract

Methods of formation of thin film structures and sensor elements based on carbon nanotubes have been developed. Methods of integration using deposition from solutions, probe micromechanics and the electrokinetic positioning of nanotubes providing compatibility with traditional microelectronic technology, are suggested. Peculiarities of the parallel integration of carbon nanotubes in the process of formation of thin films, networks, and individual conduction channels are revealed.

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Authors and Affiliations

  1. Moscow Institute of Electronic Technology (Technical University), Moscow, Russia

    I. I. Bobrinetskii

  2. OOO Nanosensor, Moscow, Russia

    I. I. Bobrinetskii

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  1. I. I. Bobrinetskii
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Correspondence to I. I. Bobrinetskii.

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Original Russian Text © I.I. Bobrinetskii, 2009, published in Mikroelektronika, 2009, Vol. 38, No. 5, pp. 353–360.

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Bobrinetskii, I.I. Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies. Russ Microelectron 38, 320–326 (2009). https://doi.org/10.1134/S1063739709050047

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  • DOI: https://doi.org/10.1134/S1063739709050047

PACS

  • 78.70.Bj