The solution proposed relates to flicker-noise gas sensors under development, which differ from conventional chemical sensors in offering exceptional selectivity for the analysis of a gaseous environment. The classification and analytical justification are given of low-frequency-noise spectroscopy techniques and measures that are proposed for investigation of disordered semiconductors. The feasibility is shown of patterning processes for flicker-noise gas sensors. Some methods are proposed for these processes and for measurement procedures of gaseous-environment monitoring.
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Original Russian Text © M.I. Makoviychuk, 2008, published in Mikroelektronika, 2008, Vol. 37, No. 4, pp. 258–269.
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Makoviychuk, M.I. Potential applications of LF-noise spectroscopy to the development of new-generation gas sensors. Russ Microelectron 37, 226–237 (2008). https://doi.org/10.1134/S1063739708040033