Russian Microelectronics

, Volume 37, Issue 4, pp 226–237 | Cite as

Potential applications of LF-noise spectroscopy to the development of new-generation gas sensors

  • M. I. MakoviychukEmail author
Materials and Microstructure Characterization


The solution proposed relates to flicker-noise gas sensors under development, which differ from conventional chemical sensors in offering exceptional selectivity for the analysis of a gaseous environment. The classification and analytical justification are given of low-frequency-noise spectroscopy techniques and measures that are proposed for investigation of disordered semiconductors. The feasibility is shown of patterning processes for flicker-noise gas sensors. Some methods are proposed for these processes and for measurement procedures of gaseous-environment monitoring.

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© MAIK Nauka 2008

Authors and Affiliations

  1. 1.Yaroslavl Branch, Institute of Physics and TechnologyRussian Academy of SciencesYaroslavlRussia

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