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Journal of Analytical Chemistry

, Volume 65, Issue 13, pp 1311–1319 | Cite as

Atom probe mass spectrometry

  • A. B. TolstoguzovEmail author
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Abstract

A brief review of the stages of the evolution and the current status of atom-probe techniques with a special emphasis on 3D tomography with laser-assisted field evaporation is provided. The sample preparation is discussed; the results of the investigation of metals, alloys, semiconductor structures and dielectric layers, and organic materials are presented. Because of the high spatial resolution (0.1–0.3 nm in all three directions) and excellent compositional sensitivity (better than 10−3 at %), atom probes hold much promise in nanotechnology.

Keywords

atom probe 3D atom-probe tomography depth profiling field and laser-assisted evaporation semiconductor structures time-of-flight mass spectrometry 

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Copyright information

© Pleiades Publishing, Ltd. 2010

Authors and Affiliations

  1. 1.Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e Tecnologia (FCT)Universidade Nova de LisboaCaparicaPortugal

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