Abstract
A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.
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Tolipov, Kh.B. and Kleshchev, D.G., RF Patent 2016100979, 2016.
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Original Russian Text © Kh.B. Tolipov, 2016, published in Defektoskopiya, 2016, No. 10, pp. 22–25.
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Tolipov, K.B. A facility for measuring the thickness of thin metal films. Russ J Nondestruct Test 52, 554–556 (2016). https://doi.org/10.1134/S1061830916100090
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DOI: https://doi.org/10.1134/S1061830916100090