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Gas-Jet Synthesis of Diamond Coatings from a H2+CH4+Ar Mixture Activated in a Microwave Discharge

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Abstract

In this study, a gas-jet diamond synthesis method using a high-speed jet for the transportation of gases activated in microwave plasma of gases to a substrate was developed. Diamond was synthesized in a hydrogen–methane–argon mixture. The diamond synthesis rate (130 µm/h) exceeded the rate attained in earlier gas-jet experiments with activation in microwave plasma without argon additions.

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Funding

This study was conducted as a State Assignment (budget grant no. 121031800218-5) and was supported financially by the Russian Foundation for Basic Research (project no. 18-29-19069).

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Authors and Affiliations

  1. Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

    A. K. Rebrov, A. A. Emel’yanov, V. A. Pinaev, M. Yu. Plotnikov, N. I. Timoshenko & I. B. Yudin

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  1. A. K. Rebrov
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  2. A. A. Emel’yanov
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  3. V. A. Pinaev
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  4. M. Yu. Plotnikov
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  5. N. I. Timoshenko
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  6. I. B. Yudin
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Corresponding author

Correspondence to A. K. Rebrov.

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Translated by E. Glushachenkova

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Rebrov, A.K., Emel’yanov, A.A., Pinaev, V.A. et al. Gas-Jet Synthesis of Diamond Coatings from a H2+CH4+Ar Mixture Activated in a Microwave Discharge. Dokl. Phys. 67, 197–200 (2022). https://doi.org/10.1134/S1028335822070047

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  • DOI: https://doi.org/10.1134/S1028335822070047

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