Formation of Carbon Nanofibers on the Surface of a Photoresist under the Action of a Powerful Ion Beam of Nanosecond Duration

Abstract

The effect of a high-power ion beam of nanosecond duration on the layers of an FP383 positive photoresist (including with a catalytic addition of ferrocene) previously heat treated in air for 30 min is studied in the temperature range 100–350°C. It is shown that the preliminary heat treatment of a pure photoresist at a temperature of 300°C and subsequent irradiation with a high-power ion beam leads to the formation of carbon nanofibers (with an average diameter of 100 nm and a length of up to 2.5 microns) and sheet-like carbon structures (with a transverse size of ~1.5 microns) on its surface. The formation of carbon nanofibers with the most probable diameter of 90 nm and a length of up to 0.9 microns is found on the surface of the photoresist with the addition of ferrocene irradiated after heat treatment at a temperature of 150°C. With an increase in the pretreatment temperature, the formation of predominantly sheet-like carbon structures is observed on the surface of the irradiated photoresist (both pure and with the addition of ferrocene). The possible influence of the treatment temperature and the catalyst on the formation of carbon nanostructures on the photoresist surface under irradiation by a high-power ion beam of nanosecond duration is discussed.