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On the Sputtering of Copper Phthalocyanine Molecules on a GaAs Substrate under Bombardment with Multiply Charged Ions

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Abstract—

The dependence of the yield of sputtered copper phthalocyanine molecules (CuPc) on a GaAs single-crystal substrate on the charge and energy of bombarding multiply charged Biq+ ions (q = 1–5) is studied by means of secondary-ion mass spectroscopy in the energy range of 1–10 keV. The yield of secondary ions is measured by the scanning of primary ions in terms of the charge and by varying the magnetic field of the mass spectrometer of primary ions when tuning the mass spectrometer of secondary ions to the corresponding secondary ion. The yield of sputtered copper phthalocyanine molecules that are converted to positive CuPc+ ions on the surface of a surface-ionization emitter is studied as a function of the charge and energy of muiltiply charged Biq+ ions. An increase in the yield of sputtered phthalocyanine molecules is observed as the charge of multiply charged ions increases; it significantly advances the increase in the integrated sputtering yield, which is related to that in the kinetic energy proportional to the Biq+ ion charge (q = 1–5).

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ACKNOWLEDGMENTS

We are grateful to Sergei Nikolaevich Morozov for participation in the experiments and data interpretation.

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Authors and Affiliations

  1. Institute of Ion-Plasma and Laser Technologies, Uzbekistan Academy of Sciences, 100125, Tashkent, Uzbekistan

    Sh. Dj. Akhunov, U. Kh. Rasulev & D. T. Usmanov

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  1. Sh. Dj. Akhunov
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  2. U. Kh. Rasulev
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  3. D. T. Usmanov
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Correspondence to Sh. Dj. Akhunov or D. T. Usmanov.

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Translated by L. Kulman

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Akhunov, S.D., Rasulev, U.K. & Usmanov, D.T. On the Sputtering of Copper Phthalocyanine Molecules on a GaAs Substrate under Bombardment with Multiply Charged Ions. J. Surf. Investig. 15, 396–400 (2021). https://doi.org/10.1134/S1027451021020208

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