Skip to main content
SpringerLink
Log in

Study of Silicon and the Transition Layer between Titanium and Titanium Oxide by Laser-Assisted Atom Probe Tomography

  • Published:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Aims and scope Submit manuscript

Abstract

Monitoring the characteristics of nanoscale objects is a necessary step in the development of new materials and complex low-dimensional systems. Atom-probe tomography is among the few methods that allow one to study nanoscale objects with a complex chemical composition. However, preliminary optimization of the instrument parameters is necessary for each speciment to obtain the most accurate characteristics of the materials. In this study, the results of optimization of conditions for the analysis of silicon and the titanium–titanium-oxide transition layer on a APPLE-3D atom-probe tomograph with the purpose of refining the atom-probe-tomography technique for metal–semiconductor structures are presented. The optimal laser-pulse power for studying mixtures of these materials is determined. The atomic structure of the titanium–titanium-oxide interface layer is visualized, and the concentration profiles of evaporated Ti and TiOx ions in the transition layer are obtained.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.

Similar content being viewed by others

REFERENCES

  1. M. K. Miller and R. G. Forbes, Atom-Probe Tomography: The Local Electrode Atom Probe (Springer, London, 2014). https://doi.org/10.1007/978-1-4899-7430-3

    Book  Google Scholar 

  2. P. Stender, C. Oberdorfer, M. Artmeier, P. Pelka, et al., Ultramicroscopy 107 (9), 726 (2007). https://doi.org/10.1016/j.ultramic.2007.02.032

    Article  CAS  Google Scholar 

  3. S. V. Rogozhkin, N. A. Iskandarov, A. A. Lukyanchuk, A. S. Shutov, et al., Inorg. Mater.: Appl. Res. 9 (2), 231 (2018). https://doi.org/10.1134/S2075113318020247

    Article  Google Scholar 

  4. S. V. Rogozhkin, A. A. Khomich, A. A. Nikitin, O. A. Raznitsyn, et al., Phys. At. Nucl. 81 (11), 1563 (2018). https://doi.org/10.1134/S1063778818120049

    Article  CAS  Google Scholar 

  5. S. Kim, T. Y. Kim, K. H. Lee, T. H. Kim, et al., Nat. Commun. 8, 15891 (2017). https://doi.org/10.1038/ncomms15891

    Article  CAS  Google Scholar 

  6. W. M. Arden, Curr. Opin. Solid State Mater. Sci. 6 (5), 371 (2002). https://doi.org/10.1016/S1359-0286(02)00116-X

    Article  Google Scholar 

  7. K. F. Albertin, M. A. Valle, and I. Pereyra, J. Integr. Circuits Syst. 2, 89 (2007).

    Google Scholar 

  8. S. S. Djordjevic, K. Shang, B. Guan, S. T. Cheung, et al., Opt. Express 21 (12), 13958 (2013).

    Article  CAS  Google Scholar 

  9. A. P. Alekhin, G. I. Lapushkin, A.M. Markeev, A. A. Sigarev, et al., J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 4, 379 (2010).

    Article  Google Scholar 

  10. K. Inoue, F. Yano, A. Nishida, T. Tsunomura, et al., Appl. Phys. Lett. 92 (10), 103506 (2008). https://doi.org/10.1063/1.2891081

    Article  CAS  Google Scholar 

  11. K. Inoue, F. Yano, A. Nishida, H. Takamizawa, et al., Appl. Phys. Lett. 95 (4), 043502 (2009). https://doi.org/10.1063/1.3186788

    Article  CAS  Google Scholar 

  12. K. Inoue, F. Yano, A. Nishida, H. Takamizawa, et al., Ultramicroscopy 109 (12), 1479 (2009). https://doi.org/10.1016/j.ultramic.2009.08.002

    Article  CAS  Google Scholar 

  13. H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama, et al., Appl. Phys. Lett. 99 (13), 133502 (2011). https://doi.org/10.1063/1.3644960

    Article  CAS  Google Scholar 

  14. S. V. Rogozhkin, A. A. Aleev, A. A. Lukyanchuk, A. S. Shutov, et al., Instrum. Exper. Tech. 60 (3), 428 (2017). https://doi.org/10.1134/S002044121702021X

    Article  Google Scholar 

  15. T. F. Kelly and M. K. Miller, Rev. Sci. Instrum. 78 (3), 031101 (2007). https://doi.org/10.1063/1.2709758

    Article  CAS  Google Scholar 

  16. O. A. Raznitsyn, A. A. Lukyanchuk, A. S. Shutov, S. V. Rogozhkin, et al., J. Anal. Chem, 72 (14), 1404 (2017). https://doi.org/10.1134/S1061934817140118

    Article  CAS  Google Scholar 

  17. O. A. Raznitsyn, A. A. Lukyanchuk, A. S. Shutov, S. V. Rogozhkin, et al., Yad. Fiz. Inzhin. 8 (2), 138 (2017). https://doi.org/10.1134/S2079562917020208

    Article  Google Scholar 

  18. V. V. Khoroshilov, O. A. Korchuganova, A. A. Lukyanchuk, O. A. Raznitsyn, et al., J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 12 (1), 87 (2018). https://doi.org/10.1134/S1027451017060106

    Article  CAS  Google Scholar 

  19. T. F. Kelly, A. Vella, J. H. Bunton, J. Houard, et al., Curr. Opin. Solid State Mater. Sci. 18 (2), 81 (2014). https://doi.org/10.1016/j.cossms.2013.11.001

    Article  CAS  Google Scholar 

  20. A. S. Shutov, A. A. Lukyanchuk, S. V. Rogozhkin, O. A. Raznitsyn, et al., Yad. Fiz. Inzhin. 8 (2), 141 (2017). https://doi.org/10.1134/S2079562917020221

    Article  Google Scholar 

  21. A. A. Aleev, S. V. Rogozhkin, A. A. Lukyanchuk, A. S. Shutov, et al., State Certificate No. 2018661876 of Computer Software Registration (20 September 2018) [in Russian].

  22. B. Gault, M. P. Moody, J. M. Cairney, and S. P. Ringer, Atom Probe Microscopy, Vol. 160 of Springer Series in Material Science (Springer, New York, 2012). https://doi.org/10.1007/978-1-4614-3436-8

  23. M. Muller, D. W. Saxey, G. D. W. Smith, and B. Gault, Ultramicroscopy 111, 487 (2011).

    Article  CAS  Google Scholar 

  24. A. Cerezo and P. H. Clifton, Ultramicroscopy 107, 720 (2007).

    Article  CAS  Google Scholar 

  25. V. B. Lazarev, V. V. Sobolev, and I. S. Shaplygin, Chemical and Physical Properties of Simple Metal Oxides (Nauka, Moscow, 1983) [in Russian].

    Google Scholar 

Download references

Funding

The analysis of the materials by atom-probe tomography was performed using equipment of the Center for Collective Use KAMIKS (http://kamiks.itep.ru/) at the NRC “Kurchatov Institute”—ITEP.

Author information

Authors and Affiliations

  1. Institute for Theoretical and Experimental Physics named by A.I. Alikhanov of National Research Centre “Kurchatov Institute”, 117218, Moscow, Russia

    O. A. Raznitsyn, A. A. Lukyanchuk, I. A. Raznitsyna, A. S. Shutov, A. A. Khomich, V. V. Khoroshilov, A. A. Nikitin, A. A. Aleev & S. V. Rogozhkin

  2. National Research Nuclear University (MEPhI), 115409, Moscow, Russia

    O. A. Raznitsyn, A. A. Lukyanchuk, A. S. Shutov, A. A. Khomich, V. V. Khoroshilov, A. A. Nikitin, A. A. Aleev & S. V. Rogozhkin

Authors
  1. O. A. Raznitsyn
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. A. Lukyanchuk
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. I. A. Raznitsyna
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. S. Shutov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. A. Khomich
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. V. V. Khoroshilov
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. A. A. Nikitin
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. A. A. Aleev
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. S. V. Rogozhkin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to O. A. Raznitsyn.

Additional information

Translated by O. Kadkin

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Raznitsyn, O.A., Lukyanchuk, A.A., Raznitsyna, I.A. et al. Study of Silicon and the Transition Layer between Titanium and Titanium Oxide by Laser-Assisted Atom Probe Tomography. J. Surf. Investig. 14, 882–888 (2020). https://doi.org/10.1134/S1027451020050158

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1027451020050158

Keywords:

Search

Navigation