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Determination of the Beam-Focus Plane in a SEM by the Dependence of the Signal Contrast on the Potential of a Focusing Electrode

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Abstract

The work considers a method for processing signals in a scanning electron microscope equipped with an additional focusing electrode. The method is based on the dependence of signal contrast on the potential of a focusing electrode. In turn, the dependence of the signal contrast on the height of the focusing point relative to the base surface of the sample allows us to establish unambiguous agreement: the value of the electrode potential is the height of the beam focusing point above the surface of the sample. The proposed method solves the problem of determining the plane of exact focusing of the electron beam relative to the microrelief of the sample and setting this plane to a given height relative to the base surface of the sample with increased accuracy by changing the potential of the focusing electrode, thereby reducing the time required to correct the position of the beam focusing point.

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FUNDING

The work was funded as part of state task no. 075-00475-19-00.

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Authors and Affiliations

  1. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 142432, Chernogolovka, Russia

    V. V. Kazmiruk, I. G. Kurganov, A. A. Podkopaev & T. N. Savitskaya

Authors
  1. V. V. Kazmiruk
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  2. I. G. Kurganov
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  3. A. A. Podkopaev
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  4. T. N. Savitskaya
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Correspondence to V. V. Kazmiruk, I. G. Kurganov or T. N. Savitskaya.

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Kazmiruk, V.V., Kurganov, I.G., Podkopaev, A.A. et al. Determination of the Beam-Focus Plane in a SEM by the Dependence of the Signal Contrast on the Potential of a Focusing Electrode. J. Surf. Investig. 14, 918–921 (2020). https://doi.org/10.1134/S1027451020050080

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  • DOI: https://doi.org/10.1134/S1027451020050080

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