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Tungsten-Containing Phases in Diamond-Like Silicon−Carbon Nanocomposites

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Abstract—

Using scanning electron microscopy and X-ray photoelectron spectroscopy, we investigate the chemical forms of tungsten incorporated into diamond-like silicon–carbon films. The films are fabricated by simultaneously carrying out the plasmochemical decomposition of a silicon organic precursor and magnetron sputtering of the metal. Films of tungsten-containing diamond-like silicon–carbon nanocomposites are found to contain a considerable amount of the amorphous phase of tungsten oxide, along with nanocrystalline tungsten carbide.

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Funding

The work was supported by the Russian Foundation for Basic Research (grant no. 19-07-00021).

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Authors and Affiliations

  1. National Research University MPEI (Moscow Power Engineering Institute), 111250, Moscow, Russia

    A. I. Popov, V. P. Afanas’ev, A. D. Barinov, Yu. N. Bodisko, A. S. Gryazev, I. N. Miroshnikova & M. L. Shupegin

  2. National Research Center “Kurchatov Institute”, 123182, Moscow, Russia

    M. Yu. Presnyakov

  3. Institute of Nanotechnology of Microelectronics, Russian Academy of Sciences, 119991, Moscow, Russia

    A. I. Popov, A. D. Barinov & I. N. Miroshnikova

Authors
  1. A. I. Popov
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  2. V. P. Afanas’ev
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  3. A. D. Barinov
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  4. Yu. N. Bodisko
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  5. A. S. Gryazev
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  6. I. N. Miroshnikova
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  7. M. Yu. Presnyakov
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  8. M. L. Shupegin
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Corresponding author

Correspondence to A. I. Popov.

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Translated by A. Kukharuk

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Popov, A.I., Afanas’ev, V.P., Barinov, A.D. et al. Tungsten-Containing Phases in Diamond-Like Silicon−Carbon Nanocomposites. J. Surf. Investig. 13, 832–835 (2019). https://doi.org/10.1134/S1027451019050124

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  • DOI: https://doi.org/10.1134/S1027451019050124

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