Abstract—
A computer simulation of the electron-optical system of a low-voltage scanning electron microscope is carried out. The finite element method is used to calculate the electromagnetic fields of the system. It is established that the system with intermediate electron acceleration inside the column is the most suitable for the low-voltage mode. It is shown that the best combination of resolution and performance can be obtained when the 3rd condenser—objective lens system is operating close to the telecentric mode. At the same time, compared with the telecentric mode, the measurement performance can be increased by 35% at the lowest achievable resolution. Compared with traditional SEM (scanning electron microscope) configurations, the proposed solution provides an increase in performance of more than 100 times while maintaining the specified accuracy of measuring the size of structures with a minimal size of up to 65 nm.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
REFERENCES
V. V. Kaz’miruk and T. N. Savitskaya, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech., 3, 781 (2009).
B. Bunday and U. Kramer, Proc. of SPIE 2009 (ISMI, Qimonda GmbH, Dresden, 2009), vol. 7272, p. 727204.
V. V. Kazmiruk and M. Yu. Barabanenkov, ECS Transactions 23 (1), 43 (2009).
M. Yu. Barabanenkov, V. V. Kaz’miruk, and I. G. Kurganov, Abstr. Russ. Conf. Electron Microscopy (Chernogolovka, 2012), p. 172.
V. V. Kazmiruk and T. N. Savitskaja, http://xxx.lanl.gov/abs/0805.0248
M. Yu. Barabanenkov, V. V. Kaz’miruk and T. N. Savitskaya, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech., 4 (5), 733 (2010).
V. V. Kaz’miruk and T. N. Savitskaya, Abstr. Russ. Conf. Electron Microscopy (Chernogolovka, 2010), p. 64.
V. V. Kaz’miruk, I. G. Kurganov, T. N. Savitskaya, A. V. Borodin, M. N. Kuz’min, and D. O. Novikov, Abstr. Int Forum “Technounity – Electron Beam Technology for Microelectronics” (Moscow, Zelenograd, 2017), p. 53.
V. V. Kaz’miruk and T. N. Savitskaya, Izv. Ross. Akad. Nauk, Ser. Fiz., 74 (7), 988 (2010).
V. V. Kaz’miruk, I. G. Kurganov, N. N. Osipov, A. A. Podkopaev, and T. N. Savitskaya, Abstr. Russ. Conf. Electron Microscopy (Moskva, Zelenograd, 2016), p. 318.
V. V. Kaz’miruk, I. G. Kurganov, and T. N. Savitskaya, Abstr. Russ. Symp. Raster Electron Microscopy and Analytical Methods in Solids Research (Chernogolovka, 2013), p. 24.
I. Mullerova and L. Frank, Adv. Imaging & Electron Phys. 128, 309 (2003).
V. V. Kaz’miruk, I. G. Kurganov, and T. N. Savitskaya, Izv. Ross. Akad. Nauk, Ser. Fiz. 78 (9), 1058 (2014).
V. V. Kaz’miruk, I. G. Kurganov, N. N. Osipov, V. Kolarzhik, E. Tsoufalova, and M. Drshtichka, Abstr. Russ. Conf. Electron Microscopy (Chernogolovka, 2014), p. 210.
V. V. Kaz’miruk and T. N. Savitskaya, Izv. Ross. Akad. Nauk, Ser. Fiz. 75 (9), 1263 (2011).
I. G. Kurganov Abstr. Int Forum “Technounity—Electron Beam Technology for Microelectronics” (Moscow, Zelenograd, 2017), p. 102.
B. Lencova and J. Zlamal, Electron Optical Design Program (EOD). Vers, 69 (2009).
B. Lencova and J. Zlamal, Physics Procedia 1 (1), 315 (2008).
B. Lencova and J. Zlamal, Nucl. Instrum. Methods in Phys. Res. A 645 (1), 278 (2011).
J. Goldstein, D. Newbury, P. Echlin, et al., Scanning Electron Microscopy and X-ray Microanalysis (Springer, NY, 1981; Mir, Moscow, 1984), Vol. 1.
Funding
This study was funded in the framework of State task no. 075-00475-19-00.
Author information
Authors and Affiliations
Corresponding authors
Additional information
Translated by V. Alekseev
Rights and permissions
About this article
Cite this article
Kazmiruk, V.V., Kurganov, I.G., Podkopaev, A.A. et al. Optimization of the Electron Optical System of a Scanning Electron Microscope for Measuring the Size of Micro- and Nanoobjects. J. Surf. Investig. 13, 594–599 (2019). https://doi.org/10.1134/S1027451019040074
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451019040074