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Formation of Intermetallic Compounds during the Ion-Plasma Sputtering of Metal Films on Diamond

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Abstract

The morphology of the metal films deposited onto diamond by the ion-plasma method at a temperature of 600°С under vacuum (10–2 Pa) are studied by scanning electron microscopy. It is shown that crystalline formations and needle structures are formed on the surface of the films. It is established by X-ray phase analysis that NimTin compounds are mainly formed.

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Authors and Affiliations

  1. Berbekov Kabardino-Balkarian State University, 360004, Nal’chik, Kabardino-Balkar Republic, Russia

    Z. Zh. Berov

  2. North Caucasus Mining and Metallurgical Institute (State Technological University), 362021, Vladikavkaz, Republic of North Ossetia-Alania, Russia

    V. A. Sozaev, A. R. Manukyants & Yu. N. Kasumov

Authors
  1. Z. Zh. Berov
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  2. V. A. Sozaev
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  3. A. R. Manukyants
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  4. Yu. N. Kasumov
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Correspondence to V. A. Sozaev.

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Translated by O. Kadkin

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Berov, Z.Z., Sozaev, V.A., Manukyants, A.R. et al. Formation of Intermetallic Compounds during the Ion-Plasma Sputtering of Metal Films on Diamond. J. Surf. Investig. 13, 154–157 (2019). https://doi.org/10.1134/S1027451019010221

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  • DOI: https://doi.org/10.1134/S1027451019010221

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