Skip to main content
SpringerLink
Log in

Emission Theory of Amorphous Material Sputtering: the Dependence of the Sputtering Coefficient on the Angle of Primary Ion Beam Incidence

  • Published:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Aims and scope Submit manuscript

Abstract

The dependences of the sputtering coefficient on the types of accelerated ions, their energy, and the angle of incidence on a target are calculated. For Ar–Si, Хе–С, and H–W systems, acceptable coincidence between the calculated and experimental data is obtained. Two mechanisms for secondary-particle ejection from solids are established; they determine the dependences of the base sputtering coefficient for the base on the energy and the angle of primary ion incidence on the target.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. N. Pustovit, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 11 (5), 1069 (2017). doi 10.1134/S1027451017050342

    Article  Google Scholar 

  2. A. N. Pustovit, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 10 (3), 579 (2016). doi 10.1134/S1027451016030320

    Article  Google Scholar 

  3. Ch. Kittel, Introduction to Solid State Physics (John Wiley and Sons, New York, 2004).

    Google Scholar 

  4. H. H. Andersen and H. L. Bay, in Topics in Applied Physics, Vol. 47: Sputtering by Particle Bombardment I, Ed. by R. Behrisch (Springer, Berlin, Heidelberg, 1981), p. 145. doi 10.1007/3540105212_9

  5. W. Eckstein, in Sputtering by Particle Bombardment. Experiments and Computer Calculations from Threshold to MeV Energies, Ed. by R. Behrisch and W. Eckstein (Springer, Berlin, Heidelberg, 2007), p. 33. doi 10.1007/978-3-540-44502-9_3

  6. R. P. Edwin, J. Phys. D: Appl. Phys. 6, 833 (1973). https://doi.org/iopscience.iop.org/article/10.1088/0022-3727/6/7/306.

    Article  Google Scholar 

  7. R. D. Kolasinski, J. E. Polk, D. Goebel, and L. K. Johnson, Appl. Surf. Sci. 254, 2506 (2008). doi 10.1016/j.apsusc.2007.09.082

    Article  Google Scholar 

  8. W. Eckstein, J. A. Stephens, R. E. H. Clark, J. W. Davisc, A. A. Haaszc, E. Vietzked, and Y. Hirooka, Atomic and Plasma-Material Interaction Data for Fusion (International Atomic Energy Agency, Vienna, 2001), Vol. 7B, p. 5. https://doi.org/www-pub.iaea.org/MTCD/Publications/PDF/Pub23APID7b_web.pdf.

    Google Scholar 

  9. J. P. Biersack, in Fundamental and Applied Aspects of Spraying Solids: Collection of Articles 1986–1987, Ed. by E. S. Mashkova (Mir, Moscow, 1989), p. 88 [in Russian].

  10. M. D. Gabovich, N. V. Pleshivtsev, and N. N. Semashko, Ion and Atomic Beams for Controlled Fusion and Technology (Consultants Bureau, New York, 1989). https://doi.org/www.springer.com/gp/book/9780306110160.

    Book  Google Scholar 

  11. H. L. Bay and J. Bohdansky, Appl. Phys. 19, 421 (1979). https://doi.org/10.1007/BF00930106.

    Article  Google Scholar 

  12. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer, Berlin, Heidelberg, 1991). https://doi.org/10.1007/978-3-642-73513-4.

    Book  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Microelectronic Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia

    A. N. Pustovit

Authors
  1. A. N. Pustovit
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. N. Pustovit.

Additional information

Original Russian Text © A.N. Pustovit, 2018, published in Poverkhnost’, 2018, No. 9, pp. 97–101.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Pustovit, A.N. Emission Theory of Amorphous Material Sputtering: the Dependence of the Sputtering Coefficient on the Angle of Primary Ion Beam Incidence. J. Surf. Investig. 12, 918–922 (2018). https://doi.org/10.1134/S1027451018050142

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1027451018050142

Keywords

Search

Navigation