Ion-Beam Synthesis of Ferromagnetic Films by the Implantation of Co+ Ions into Silicon

  • V. V. Chirkov
  • G. G. Gumarov
  • V. Yu. Petukhov
  • A. E. Denisov


Thin ferromagnetic films of cobalt silicide are synthesized by implanting Co+ ions into single-crystal silicon plates under an external magnetic field. Scanning magnetopolarimetry shows that the samples implanted at a dose greater than 2 × 1017 cm–2 have uniaxial magnetic anisotropy. Based on the dose dependence of the anisotropy field and the experiment on switching the direction of the easy magnetization axes, it is concluded that the induced magnetic anisotropy in the resulting films is due to the directional atomic pair ordering. The absence of the effect of external mechanical stress created during implantation on the magnetic properties of cobalt-silicide films is revealed.


ion implantation ion-beam synthesis thin magnetic films magnetic anisotropy Kerr effect Néel–Taniguchi model of directional atomic pair ordering 


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  1. 1.
    A. Ionescu, C. A. F. Vaz, T. Trypiniotis, et al., Phys. Rev. B 71, 094401 (2005).CrossRefGoogle Scholar
  2. 2.
    G. G. Gumarov, V. Yu. Petukhov, V. A. Zhikharev, et al., Nucl. Instrum. Methods Phys. Res., Sect. B 267, 1600 (2009).CrossRefGoogle Scholar
  3. 3.
    G. G. Gumarov, D. A. Konovalov, A. V. Alekseev, et al., Nucl. Instrum. Methods Phys. Res., Sect. B 282, 92 (2012).CrossRefGoogle Scholar
  4. 4.
    A. V. Alekseev, G. G. Gumarov, D. A. Konovalov, et al., J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 8 (6), 1124 (2014).CrossRefGoogle Scholar
  5. 5.
    D. A. Konovalov, G. G. Gumarov, V. Yu. Petukhov, et al., Izv. Vyssh. Uchebn. Zaved., Probl. Energ., Nos. 5–6, 122 (2010).Google Scholar
  6. 6.
    L. Baczewski, J. Phys. Colloq. 46 (C6), 405 (1985).CrossRefGoogle Scholar
  7. 7.
    S. Tikadzumi, Physics of Ferromagnetism: Magnetic Characteristics and Practical Application (Mir, Moscow, 1987) [in Russian].Google Scholar
  8. 8.
    M. Vélez, S. M. Valvidares, J. Diaz, et al., IEEE Trans. Magn. 38 (5), 3078 (2002).CrossRefGoogle Scholar
  9. 9.
    J. McCord, I. Monch, J. Fassbender, et al., J. Phys. D: Appl. Phys. 42, 055006 (2009).CrossRefGoogle Scholar
  10. 10.
    H. Ryssel and I. Ruge, Ionenimplantation (B. G. Teubner Verlag, Stuttgart, 1978).CrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • V. V. Chirkov
    • 1
  • G. G. Gumarov
    • 1
  • V. Yu. Petukhov
    • 1
  • A. E. Denisov
    • 2
  1. 1.Kazan Physical-Technical Institute, Kazan Scientific CenterRussian Academy of SciencesKazanRussia
  2. 2.Nanotechnology Center of the Republic of TatarstanKazanRussia

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